Apparatus and method for calibrating a pressure detection device
A detection device, pressure technology, applied in the direction of measuring device, measuring fluid pressure, measuring fluid pressure through electromagnetic components, etc., can solve the problem of waiting time and so on
Active Publication Date: 2022-05-03
INFINEON TECH AG
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The chamber and the first set of pressure sensing devices are then brought to a third precisely defined temperature, again requiring a waiting time
Method used
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[0060] In the following description, the same or equivalent elements or elements having the same or equivalent functions are denoted by the same or equivalent reference numerals.
[0061] The features shown are used to more fully explain embodiments of the invention. However, it will be apparent to those skilled in the art that embodiments of the invention may be practiced without omitting any of the features described. In addition, the features of various embodiments described below may be combined with each other unless explicitly stated otherwise.
[0062] figure 1 A schematic diagram of a first embodiment of a device 1 according to the invention is shown. The device 1 is used for calibrating and / or testing a pressure detection device DE with a pressure sensor DS and a temperature compensation device TK.
[0063] Device 1 includes:
[0064] a chamber 2 for applying a variable temperature TE and a variable pressure DR to the pressure detection device DE;
[0065] a temp...
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Embodiments relate to an apparatus for calibrating a pressure detection device, having a pressure sensor and a temperature compensating device, the device comprising: a chamber for applying a variable temperature and a variable pressure to the pressure detection device; a temperature regulating device for regulating the temperature in the chamber , configured to strictly monotonically increase or strictly monotonically decrease the temperature in the chamber during the time interval; the pressure regulating device, to regulate the pressure in the chamber, configured to, during at least one time interval, during a plurality of sub-intervals of a time interval, the chamber a monotonically increasing or monotonically decreasing pressure in the chamber; a reference pressure sensor for detecting the pressure within the chamber during the time interval; and a data record generating means for generating a data record configured for a plurality of discrete times during a time interval A point generates an associated data record comprising a reference pressure value generated by a reference pressure sensor, a pressure value determined by the pressure sensor and a temperature value of a temperature sensor based on the temperature compensation means.
Description
technical field [0001] This embodiment relates to a device and method for calibrating a pressure detection device. Background technique [0002] Since ordinary pressure sensors are temperature-dependent in many cases, in many cases, the pressure detection device also has a temperature compensation device in addition to the actual pressure sensor. Therefore, it is usually necessary to calibrate each individual pressure sensor after production. [0003] In devices known from practice for calibrating pressure detection means, in a first step a first set of pressure detection means is introduced into the chamber. The chamber and the first set of pressure detection means are then brought to a first precisely defined temperature, which usually requires a certain waiting time. Now, at different predetermined pressures, the pressure values of the pressure detection devices are detected to obtain a plurality of pressure values for each pressure detection device, the above press...
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IPC IPC(8): G01L27/00G01L19/04
CPCG01L27/002G01L27/005G01L19/04G01L9/125
Inventor D·诺伊迈尔C·詹克纳
Owner INFINEON TECH AG