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Micro-filter and acoustic equipment

A technology of micro-filters and acoustic equipment, applied in the direction of dispersed particle filtration, loudspeakers, sensors, etc., can solve the problems of large resistance, the contradiction between strength and opening, and the low strength of ordinary metal films, so as to avoid sound resistance and penetration Ease of handling and the effect of increasing the porosity

Active Publication Date: 2019-09-20
WEIFANG GOERTEK MICROELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In addition, due to the low strength of ordinary metal films, there is a contradiction between strength and opening
For example, in order to increase the strength, the film layer needs to be made very thick, but when the hole is opened, the large hole depth will bring a large sound resistance, which is not conducive to the performance of the acoustic equipment

Method used

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  • Micro-filter and acoustic equipment
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Examples

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Embodiment Construction

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

[0028] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.

[0029] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the description.

[0030] In all examples shown and discussed herein, any specific values ​​should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodiment may have dif...

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Abstract

The invention discloses a micro-filter and acoustic equipment. The micro-filter comprises a substrate with a back cavity, and a film layer arranged on the substrate and suspended on the back cavity, wherein through holes are distributed in the film layer, and the film layer adopts an amorphous metal film. According to one embodiment of the invention, the amorphous metal film is adopted as the film layer of the micro-filter, on the basis that the strength of the film layer is guaranteed, the aperture ratio of the film layer can be increased, the thickness of the film layer can be reduced, permeation treatment becomes easy, smaller through holes can be formed, and sound resistance caused by large hole depth after hole forming of a traditional thick film is avoided.

Description

technical field [0001] The present invention relates to a micro-filter, which can be a micro-filter suitable for acoustic equipment to filter dust, particles or / and water and other substances that are not expected to enter the interior of the acoustic equipment. Background technique [0002] Portable computing devices such as laptops and tablets are ubiquitous, as are portable communication devices such as smart phones. However, these devices do not have enough room for relatively large microphones or speakers. Accordingly, microphones and speakers are becoming more and more compact in size and reduced in size. In addition, the microphones and speakers in these portable settings usually need to be close to the relevant acoustic input or output ports of the terminal, so that particles and water can easily enter the microphones and speakers, causing the failure of these acoustic devices. [0003] Filter membranes are sometimes deployed in older equipment to prevent certain t...

Claims

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Application Information

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IPC IPC(8): H04R9/06B01D46/54H04R7/12H04R9/02
CPCH04R9/06H04R9/02B01D46/543H04R7/12H04R2400/11H04R2207/021H04R1/023H04R1/086
Inventor 林育菁
Owner WEIFANG GOERTEK MICROELECTRONICS CO LTD
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