The embodiment of the invention relates to the technical field of
semiconductor devices, and discloses an
MEMS microphone and a preparation method thereof, and the
MEMS microphone comprises the components of a substrate which defines a cavity; the anchoring part is arranged above the base; the
vibrating membrane is provided with a beam structure, the beam structure is fixed above the anchoring part, so that the
vibrating membrane covers the cavity, and the
vibrating membrane and the base are arranged at an interval; the inner edge of one side, close to the vibrating diaphragm, of the substrate is provided with a chamfer. The inner edge of the side, close to the vibrating membrane, of the substrate is arranged to be the chamfer, when the vibrating membrane bends towards one side of the substrate due to vibration, the vibrating membrane can be prevented from impacting the substrate through the chamfer, or when the vibrating membrane impacts the substrate, the contact area between the vibrating membrane and the substrate is increased,
stress concentration is avoided, and therefore the risk that the vibrating membrane is damaged is reduced. Therefore, the
probability of failure of the
MEMS microphone due to damage of the vibrating diaphragm can be reduced, and the robustness of the MEMS
microphone is enhanced.