Novel chemical liquid phase deposition furnace
A chemical liquid deposition and liquid deposition technology, which is applied in the field of new chemical liquid deposition furnaces, can solve the problems of uncontrollable density of preforms, limited preform size, and excessive equipment power configuration, and achieves short-term, The effect of improving work efficiency and low energy consumption
Pending Publication Date: 2019-10-01
西安宸瑞电工科技发展有限公司
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Problems solved by technology
[0003] The technical problem solved by the present invention is: the present invention provides a new type of chemical liquid phase for the problems of extremely long process time, uncontrollable preform density, excessive equipment power configuration, limited preform size, and excessive consumption of precursors. furnace
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[0042] The preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.
[0043] The new chemical liquid phase deposition furnace can realize the relative movement of the preform and the induction coil and the local induction heating deposition, the furnace body is vacuumed, the protective gas is introduced during operation, the supply of the precursor in the precursor tank, and the condensation recovery of the precursor.
[0044] see Figure 1-Figure 2 , the process of putting the prefabricated body into the device is described as follows:
[0045] Put the prefabricated body 13 on the support 1, and after the air in the furnace is evacuated through the vacuum port 7, the protective gas is filled. In this embodiment, the protective gas is...
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Abstract
The invention provides a novel chemical liquid phase deposition furnace for compaction and production preparation of a carbon / carbon composite material. The novel chemical liquid phase deposition furnace comprises a work room, a condenser and a furnace cover; the work room and the condenser are two chambers which a plurality of condensing pipes run through; the work room comprises a precursor groove, a bracket, a preform, an induction coil and the like; the preform is subjected to local induction heating in the work room, so that liquid phase deposition is realized; the precursor groove is positioned in the work room and the bottom of the precursor groove is not contacted with the bottom of the work room; a precursor is filled between the precursor groove and the bottom of the work room; the precursor groove is filled with a precursor; and the novel chemical liquid phase deposition furnace adopts local induction heating, so that the preform is not limited by size, and compared with thetraditional chemical liquid phase deposition furnace working state, the compaction effect of the novel chemical liquid phase deposition furnace is controllable and the production cost is reduced. Thenovel chemical liquid phase deposition furnace adopts a multi-pipe spiral shaft type condenser, so that the recovering rate of the precursor is greatly increased and environmental pollution is reduced while the cost is saved.
Description
technical field [0001] The invention relates to the technical field of dense production and preparation of carbon / carbon composite materials, in particular to a novel chemical liquid phase deposition furnace. Background technique [0002] The preparation of existing carbon / carbon composite materials is carried out by chemical vapor deposition (CVD) and traditional chemical liquid deposition (CLD), wherein the specific implementation device of chemical vapor deposition (CVD) is a chemical vapor deposition furnace , This type of equipment heats the preform as a whole during the production process, and the process time lasts for about 400 to 800 hours, increasing the skeleton density of the preform from 0.3-0.8g / cm3 to more than 1.3g / cm3. Among them, the specific implementation device of the traditional chemical liquid deposition method (CLD) is a chemical liquid deposition furnace. The heating time of the preform in the production of this type of equipment is 1 / 50-1 / 100 hours ...
Claims
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IPC IPC(8): C23C18/00
CPCC23C18/00
Inventor 周挺岳浩
Owner 西安宸瑞电工科技发展有限公司