Novel chemical liquid deposition furnace
A chemical liquid deposition and liquid deposition technology, which is applied in the field of new chemical liquid deposition furnaces, can solve the problems of uncontrollable density of preforms, limited size of preforms, and excessive equipment power configuration. The effect of improving work efficiency and low energy consumption
Inactive Publication Date: 2019-01-18
西安宸瑞电工科技发展有限公司
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Problems solved by technology
[0003] The technical problem solved by the present invention is: the present invention provides a new type of chemical liquid phase for the problems of extremely long process time, uncontrollable preform density, excessive equipment power configuration, limited preform size, and excessive consumption of precursors. furnace
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[0042] The preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.
[0043] The new chemical liquid phase deposition furnace can realize the relative movement of the preform and the induction coil and the local induction heating deposition, the furnace body is vacuumed, the protective gas is introduced during operation, the supply of the precursor in the precursor tank, and the condensation recovery of the precursor.
[0044] see Figure 1-Figure 2 , the process of putting the prefabricated body into the device is described as follows:
[0045] Put the prefabricated body 13 on the support 1, and after the air in the furnace is evacuated through the vacuum port 7, the protective gas is filled. In this embodiment, the protective gas is...
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Abstract
The invention provides a novel chemical liquid deposition furnace in densification, production and preparation of carbon-carbon composites. The novel chemical liquid deposition furnace comprises a working chamber, a condenser and a furnace cover; the working chamber and the condenser are two chambers which are communicated through a plurality of condensation pipes; the working chamber comprises aprecursor groove, supports, a prefabricated body, an induction coil and the like; the prefabricated body is subjected to local induction heating in the working chamber so as to realize liquid deposition; the precursor groove is located in the working chamber; the bottom of the precursor groove does not make contact with the bottom of the working chamber; the space between the precursor groove andthe bottom of the working chamber is filled with a precursor; and the precursor groove is filled with the precursor. The novel chemical liquid deposition furnace adopts local induction heating, so that the prefabricated body is not limited by the size, compared with the working state of a traditional chemical liquid deposition furnace, the densification effect of the novel chemical liquid deposition furnace can be controlled, and therefore the production cost is lowered; and the novel chemical liquid deposition furnace adopts a multi-tube spiral shaft type condenser, and therefore the recoveryrate of the precursor is greatly increased, and the pollution to the environment is reduced while the cost is saved.
Description
technical field [0001] The invention relates to the technical field of dense production and preparation of carbon / carbon composite materials, in particular to a novel chemical liquid phase deposition furnace. Background technique [0002] The preparation of existing carbon / carbon composite materials is carried out by chemical vapor deposition (CVD) and traditional chemical liquid deposition (CLD), wherein the specific implementation device of chemical vapor deposition (CVD) is a chemical vapor deposition furnace , This type of equipment heats the preform as a whole during the production process, and the process time lasts for about 400 to 800 hours, increasing the skeleton density of the preform from 0.3-0.8g / cm3 to more than 1.3g / cm3. Among them, the specific implementation device of the traditional chemical liquid deposition method (CLD) is a chemical liquid deposition furnace. The heating time of the preform in the production of this type of equipment is 1 / 50-1 / 100 hours ...
Claims
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IPC IPC(8): C23C18/00
CPCC23C18/00
Inventor 周挺岳浩
Owner 西安宸瑞电工科技发展有限公司