Unlock instant, AI-driven research and patent intelligence for your innovation.

Silicon wafer carrier for carrying silicon wafers

A silicon wafer flower basket and silicon wafer technology, applied in sustainable manufacturing/processing, electrical components, climate sustainability, etc., can solve problems such as increasing production costs of enterprises

Pending Publication Date: 2019-10-18
CHANGZHOU SHICHUANG ENERGY CO LTD
View PDF14 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing silicon wafer flower baskets are designed according to the shape of the whole silicon wafer, so the wafer flower basket needs to be independently designed separately, which increases the production cost of the enterprise.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Silicon wafer carrier for carrying silicon wafers
  • Silicon wafer carrier for carrying silicon wafers
  • Silicon wafer carrier for carrying silicon wafers

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Such as figure 1 with figure 2 As shown, the present invention provides a silicon wafer flower basket for carrying silicon wafers, the inner space of which is used to insert the silicon wafers vertically, and includes a main frame body, the main frame body includes a side wall 10 and a bottom frame 20, and the side wall 10 Surrounded by a pair of left and right side frames 11 and a pair of front and rear end plates 12, the pair of end plates 12 are upright and parallel to each other, and the pair of side frames 11 are respectively provided with vertical sides for inserting silicon wafers. To the slot, and the pair of side frames 11 cooperate with each other;

[0033] The side wall 10 is provided with a partition rod 30, the partition rod 30 is perpendicular to the end plate 12, and the partition rod 30 and the side wall 10 are detachably connected.

[0034] The dividing rod 30 is detachable; when the dividing rod 30 is removed, the silicon wafer flower basket can be inserte...

Embodiment 2

[0038] Such as image 3 As shown, on the basis of Example 1, the difference lies in:

[0039] The side wall 10 is provided with a positioning hole 40 for installing the partition rod 30, the positioning hole 40 is provided on the end plate 12, and the positioning hole 40 is located between the pair of side frames 11, the partition rod 30 and the positioning hole 40 are detachable Connected, and the partition rod 30 is positioned by the positioning hole 40.

[0040] The dividing rod 30 is positioned by the positioning hole 40, which is convenient for determining the installation position of the dividing rod 30 in the inner space of the silicon wafer flower basket to adapt to silicon wafers of different sizes.

Embodiment 3

[0042] Such as Figure 4 As shown, on the basis of embodiment 2, the difference lies in:

[0043] The side wall 10 is provided with positioning holes 40 sequentially arranged along the left and right directions.

[0044] The installation position of the partition rod 30 can be selected in the left and right direction, and the installation position of the partition rod 30 can be adjusted in the left and right direction to adapt to silicon wafers of different sizes.

[0045] Preferably, the side wall 10 is provided with positioning holes 40 sequentially arranged at equal intervals in the left and right direction; the installation position of the partition rod 30 can be adjusted at equal intervals in the left and right direction.

[0046] Preferably, the positioning holes 40 on the same end plate 12 are located on the same straight line, so that the installation position of the dividing rod can be adjusted more conveniently.

[0047] When installing the dividing rod, first adjust the insta...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a silicon wafer carrier for carrying silicon wafers. The silicon wafer carrier is internally disposed with the silicon wafers. The silicon wafer carrier includes a main frame body, wherein the main frame body includes a side wall and a bottom frame, the side wall is surrounded by a pair of left and right side frames and a pair of front and rear end plates, the pair of end plates are vertical and parallel to each other, the side frames are respectively provided with vertical slots for inserting the silicon wafers at the sides, the pair of side frames cooperate with eachother, the side wall is provided with a separation rod, the separation rod is perpendicular to the end plates, and the separation rod and the side wall are in detachable connection. A silicon wafer carrier in the prior art is detachably configured with the separation rod, when the separation rod is dismounted, a row of vertical silicon wafers can be inserted in the silicon wafer carrier; when theseparation rod is mounted, the internal space of the silicon wafer carrier can be divided, two rows of silicon wafers can be inserted, and the two rows of the silicon wafers can be set up and down orleft and right.

Description

Technical field [0001] The invention relates to a silicon wafer flower basket for carrying silicon wafers. Background technique [0002] The silicon wafer flower basket is a tool for carrying silicon wafers. Its internal space is used to insert and place the silicon wafers vertically. It includes a main frame. The main frame includes a side wall and a bottom frame. The side wall consists of a pair of left and right side frames and A pair of front and rear end plates are enclosed, the pair of end plates are vertical and parallel to each other, the pair of side frames are respectively provided with vertical slots for inserting the side of the silicon chip, and the pair of side frames are matched with each other. [0003] The side frame of the existing silicon wafer flower basket mainly has two forms: [0004] 1) The side frame adopts a slot plate; the slot plate includes: a vertical plate-shaped main body, and a row of vertical slots arranged on one side of the plate-shaped main body;...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01L21/673H01L31/18
CPCH01L21/6732H01L21/67326H01L31/1876Y02P70/50
Inventor 孟祥熙潘维
Owner CHANGZHOU SHICHUANG ENERGY CO LTD