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Substrate processing device and display method for same

A technology of a substrate processing device and a display method, which is applied in the fields of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., and can solve problems such as time wasting, not knowing when processing tasks will start to be executed, and device setting operation delays

Active Publication Date: 2019-11-15
KOKUSA ELECTRIC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, it is not known when each scheduled processing task will be executed and when it will end
Therefore, it is difficult for the operator to predict the time when the device will be in a specific state, and the arrangement of the device will waste time and cause delays in the installation of the device.

Method used

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  • Substrate processing device and display method for same
  • Substrate processing device and display method for same
  • Substrate processing device and display method for same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0083] (Example 1) Figure 5 It shows the processing flow of the graph display program of this embodiment for displaying the schedule of tasks.

[0084] When the controller 121 is activated, the graph display program starts, and first, the controller 121 acquires the current time. Next, a search is performed in the storage unit 121c to check whether there is a task scheduled to be executed by the device. If no tasks exist, end or remain in standby. In any case, when an update button described later is pressed, the program is restarted from the acquisition of the current time.

[0085] When a job is retrieved, the controller 121 acquires information on the job. Acquire not only task information (name, recipe name, scheduled start time, scheduled end time, etc.), but also at least recipe information (name, category, processing room, processing data, etc.) executed by the task.

[0086] Next, it is determined whether the task has been reserved or is currently being executed. ...

Embodiment 2

[0106] (Example 2) Figure 10 is the processing flow of the graphic display program representing the executed tasks of the present embodiment, Figure 11 An example of the production information screen displayed on the operation screen of the input / output device 122 by executing the graph display program is shown.

[0107] When the button to switch to the production information screen is pressed, the graphic display program of the executed tasks starts. First, the controller 121 acquires the current time. Next, a search is performed in the storage unit 121c to check whether or not there is a task already executed by the device (executed task). Ends if there are no executed tasks. In addition, when an update button (not shown) is pressed, the program is restarted, and the current time is acquired.

[0108] When the executed task is retrieved, the controller 121 obtains information of the executed task. Obtain not only task information (name, recipe name, scheduled start ti...

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PUM

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Abstract

The purpose of the present invention is to provide a configuration capable of chronologically displaying an execution schedule for jobs. Provided is a configuration comprising a display unit having anoperation screen containing a two-dimensional space in which one axis is the reservation status of each job executed by a device, including a job currently being executed by the device, and the otheraxis is a predetermined monitoring period. The configuration also comprises a display control unit configured to: acquire various types of information, including the start time and scheduled end timeof a job being executed by the device or the scheduled start time and scheduled end time of a job reserved by the device; to calculate the scheduled execution time of the job from the acquired starttime and scheduled end time of the job currently being executed and / or the scheduled start time and scheduled end time of the reserved job; and to display a chart on the display unit as an image indicating the job currently being executed and the scheduled execution time of the reserved job.

Description

technical field [0001] The present invention relates to a substrate processing apparatus for processing a substrate and a display method thereof, for example, an apparatus for grasping the production status of a semiconductor manufacturing apparatus for forming a film on a substrate and a display method thereof. Background technique [0002] In the field of semiconductor manufacturing, a substrate container (for example, FOUP) containing a wafer to be processed (hereinafter also referred to as a substrate) is placed in the device, and film formation processing, etc. are performed on the wafer under specified conditions. For example, an instruction for processing such as film formation processing (hereinafter also referred to as a processing task) is issued from a customer host computer or an operator of an operation unit. Furthermore, the processing status of the wafer is displayed on the screen of the operation unit together with the screen image of the semiconductor manufa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/02
CPCH01L21/02
Inventor 守田修山冈雄治
Owner KOKUSA ELECTRIC CO LTD