An anti-jamming and overload-resistant mems accelerometer

Abstract

The invention discloses an anti-interference and overload-resistant MEMS accelerometer, which comprises a substrate layer, a sensing electrode layer, a movable sensing structure layer and a cap which are bonded in sequence. The motion-sensitive structure layer includes a central anchor point of the first movable-sensitive structure, a first solid movable-sensitive structure and a first hollow movable-sensitive structure; the bottom of the sensing electrode is provided with a silicon support column, the top of the silicon support column is connected to the sensing electrode, and the bottom of the sensing electrode is connected with the sensing electrode. The end is connected to the substrate layer; the central anchor point of the first movable sensitive structure, the first solid movable sensitive structure and the top of the first hollow movable sensitive structure are symmetrically bonded with the central anchor point of the second movable sensitive structure and the second solid movable sensitive structure. The movable sensitive structure and the second hollow movable sensitive structure form a closed cavity between the first hollow movable sensitive structure and the second hollow movable sensitive structure; the accelerometer can reduce the influence of the external environment on the performance of the device and improve the performance of the device. reliability.

Description

Technical field[0001]The present invention relates to the field of micro-mechanical electronics technology, and in particular, an anti-interference-resistant overload MEMS accelerometer.Background technique[0002]MEMS (Micro-Electro-MeChanical Systems) is the abbreviation of the microelectromechanical system. MEMS manufacturing techniques utilize micro-nano-machining techniques, especially those with semiconductor wafer manufacturing, manufacturing various micro-nano-level mechanical structures, combined with dedicated control integration Circuit (ASIC), constizs intelligent micro-sensor, micro-performers, micro-optical devices, and other MEMS components. The MEMS components have the advantages of small size, low cost, high reliability, high intelligence, easy integration, easy integration, are widely used in aerospace, medical, industrial production, and various types of consumer products. .[0003]At present, foreign high-performance MEMS accelerometers have been more mature, and in ...

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Problems solved by technology

[0003] At present, foreign high-performance MEMS accelerometer products are relatively mature and have been widely used in many aspects. Domestic high-performance MEMS accelerometers have been deeply researched and developed, and some companies or laboratories have prepared high-precision single-axis accelerometers. Or multi-axis accelerometer products, but they are lacking in anti-interference and overload resistance, which limits their application in high-impact environments

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