Novel method for adjusting dynamic balance of magnetic suspension turbomolecular pump

Abstract

The invention discloses a novel method for adjusting dynamic balance of a magnetic suspension turbomolecular pump. The novel method comprises the steps that a motor is stated, the speed is increased to the predetermined balance rotating speed omega and stabilized, and then initial unbalance amount amplitude values and phases at a first balance face and a second balance face are recorded; the motoris stopped to enable the rotating speed of a rotor to be decreased to zero, then, the trail mass m is added on the first balance face; the motor is started, the speed is increased to the predetermined balance rotating speed omega and stabilized, then unbalance amount amplitude values and phases at the first balance face and the second balance face after the trail mass m is added are recorded; balance mass and phases required by the first balance face and the second balance face are calculated; and meanwhile, the balance mass and the phase required by the first balance face at the top are calculated. According to the novel method, in the implementing process, the number of times of starting and stopping of the motor is decreased, and the time is short; in the implementing process, the situation that the bottom second balance face inconvenient to operate is operated is avoided; and meanwhile, the balance precision of the method is high, and the precision requirement of integral dynamicbalance of the magnetic suspension turbomolecular pump can be met.

Description

technical field [0001] The invention relates to the technical field of vacuum equipment, in particular to a new method for adjusting the dynamic balance of a magnetic levitation turbomolecular pump. Background technique [0002] With the rapid development of modern industry, more and more stringent performance requirements are put forward for rotating machinery, which is mainly reflected in the fact that the rotor, which is the core component of the machine, requires higher and higher rotation speed and precision. Since the magnetic levitation turbomolecular pump is not only a high-precision equipment, but also the turbine rotor is required to work at high speed, the vibration caused by the unbalance of the rotor is very significant, which will affect the performance of the molecular pump and the working environment, and may cause damage in severe cases, causing users Bring great safety hazards and economic losses. Therefore, the rotor of the maglev turbomolecular pump must...

AI Technical Summary

Problems solved by technology

[0007] When implementing the above balancing strategy, it is necessary to start and stop the motor many times, and to carry out retesting operations on the first balance surface on the top and the second balance surface on the bottom respectively. This dynamic balancing implementation method takes a long time, the steps are cumbersome, and the efficiency is low

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