Unlock instant, AI-driven research and patent intelligence for your innovation.

Anti-vibration device

An anti-vibration device and anti-vibration technology, applied in mechanical vibration control, vibration suppression adjustment, non-rotation vibration suppression, etc., can solve the problem of inability to vibration attenuation.

Inactive Publication Date: 2020-09-25
MITSUBISHI ELECTRIC CORP
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the vibration absorbing unit cannot properly attenuate the vibration generated on the stand due to the movement of the movable part of the driving device.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Anti-vibration device
  • Anti-vibration device
  • Anti-vibration device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach

[0018] figure 1 It is a figure which shows the structure of the anti-vibration device 1 which concerns on embodiment. The anti-vibration device 1 is a device for suppressing vibration generated in the anti-vibration control object 30 due to the operation of the movable part 12 of the driving device. The driving device movable part 12 is included in the driving device 11 . exist figure 1 In , the driving device 11 and the anti-vibration control object 30 are also shown. The anti-vibration device 1 and the driving device 11 are arranged on a stand. An example of the anti-vibration control object 30 is a stand.

[0019] The driving device 11 has: a driving device movable part 12, which has a function of moving a positioning control object; a target position generating part 13, which generates a target position of the driving device movable part 12; and a driving device control part 14, which is based on The target position generated by the target position generating unit 13 ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A vibration isolator includes: a vibration isolator moving part that suppresses vibration caused by operation of a drive unit moving part; a vibration isolating speed generation unit that generates a vibration isolating command speed on the basis of a target position of the drive unit moving part; a return speed generation unit that generates a return command speed for returning the vibration isolator moving part to an original position; a control speed generation unit that generates a control command speed by adding the vibration isolating command speed generated by the vibration isolating speed generation unit and the return command speed generated by the return speed generation unit; and a vibration isolation control unit that controls the vibration isolator moving part on the basis of the control command speed generated by the control speed generation unit.

Description

technical field [0001] The present invention relates to an anti-vibration device for suppressing vibration generated in a stand due to the operation of a driving device disposed on the stand, for example. Background technique [0002] There is known a semiconductor exposure apparatus in which a drive device is arranged on a stage. The drive device has a drive device movable part that has a function of changing the position of the positioning control object. An example of the movable part of the drive unit is an XY table. A vibration absorbing unit that absorbs vibration transmitted from the floor to the stand is often installed on the stand. In this case, the vibration transmitted from the floor to the stand is suppressed by the vibration absorbing unit. However, the vibration absorbing means cannot appropriately attenuate the vibration generated in the stand due to the operation of the movable part of the driving device. Patent Document 1 discloses an anti-vibration devi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F16F15/02
CPCF16F15/002F16F15/03B30B15/14F16F2228/04G05D19/02
Inventor 东野慎永田真也
Owner MITSUBISHI ELECTRIC CORP
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com