Two-dimensional electrostatic scanning micromirror

Abstract

The invention discloses a two-dimensional electrostatic scanning micromirror, which comprises an outer frame, an inner frame and a mirror surface. Outer frame isolation grooves are processed in the outer frame to divide the outer frame into an outer frame measuring part, an outer frame driving part and two outer frame connection parts; an outer feedback comb tooth group is arranged between the outer frame measuring part and the inner frame, an outer driving comb tooth group is arranged between the outer frame driving part and the inner frame, and mirror surface isolation grooves are processedin the mirror surface to divide the mirror surface into a mirror surface feedback part, a mirror surface driving part and a central part; and an inner feedback comb tooth groove is processed between the mirror surface feedback part and the inner frame, and an inner driving comb tooth group is arranged between the mirror surface driving part and the inner frame. The isolation groove of different structures are formed in the outer frame and mirror surface respectively to divide each of the outer frame and the mirror surface into different function parts, the inner and outer comb tooth groups areset as driving and feedback comb tooth groups respectively, deflection angles in two directions of the mirror surface are measured, and thus, reflected in real time, and the deflection angle of the mirror surface can be controlled more accurately.

Description

technical field

[0001] The invention relates to the field of micro-electro-mechanical systems, in particular to a two-dimensional electrostatic scanning micromirror that can feed back angles in real time and is manufactured based on MEMS processing technology. Background technique

[0002] MEMS refers to Micro-Electro-Mechanical System (Micro-Electro-Mechanical System), which is a revolutionary new technology developed on the basis of microelectronics technology. Electromechanical devices. MEMS devices are widely used in high-tech industries and are a key technology related to technological development, economic prosperity and national defense security. Among them, the scanning micromirror is a light reflective device developed by using MEMS technology. By connecting the twisted structure of the mirror surface, under the action of the micro driving force, the mirror surface is deflected to realize the reflection of the beam in one or two dimensions. Scanning has the advant...

Examples

Embodiment 1

[0036] Such as figure 1 and figure 2 As shown, the two-dimensional electrostatic scanning micromirror of the present invention is based on silicon material and includes an outer frame 1, an inner frame 2 and a mirror surface 3, and the mirror surface 3 is square. The outer frame 1 and the inner frame 2 are connected together by two outer torsion beams 4, and the inner frame 2 and the mirror surface 3 are connected by two inner torsion beams 5, and the directions of the inner torsion beams 5 and the outer torsion beams 4 vertical. The mirror surface 3 can deflect around the inner torsion beam 5 as the axis, and the inner frame 2 and the mirror surface 3 can deflect around the outer torsion beam 4 as the axis, thereby realizing the deflection of the mirror surface 3 in two perpendicular directions.

[0037] Four outer frame isolation grooves 6 are processed on the outer frame 1, and the outer frame isolation groove 6 divides the outer frame 1 into an outer frame measuring par...

Embodiment 2

[0043] Such as image 3 As shown, the outer frame 1 of this embodiment is divided into an outer frame measuring part 1 - 1 , an outer frame driving part 1 - 2 and an outer frame connecting part 1 - 3 by a plurality of outer frame isolation grooves 6 . The difference from Example 1 is that, if Figure 5 As shown, an outer frame isolation groove 6 of this embodiment is located at the position of the fixed teeth on one side of the outer frame 1, and the outer frame isolation groove 6 divides one side of the outer frame 1 into an outer frame measuring part 1-1 and an outer frame driving part 1-2, where the inner side of the outer frame measuring part 1-1 is connected to some static teeth, and the fixed teeth of this part and the movable teeth corresponding to the inner frame 2 form the outer feedback comb group 7-1; the inner side of the outer frame driving part 1-2 is connected to another A part of the static teeth and the movable teeth corresponding to the inner frame 2 form th...

Embodiment 3

[0048] Such as Figure 6 As shown, the mirror isolation groove 8 on the left side of the mirror 3 in this embodiment is the same as the first embodiment, and divides the mirror 3 into a mirror driving part 3-2 and a central part 3-3. The mirror isolation groove 8 on the right runs through the entire mirror surface, and the right side contains two branch isolation grooves, which are double T-shaped structures, and the right side of the mirror surface 3 is divided into three parts, the upper, middle and lower parts, which are the upper mirror driving part 3-2, The middle mirror feedback part 3-1 and the lower mirror driving part 3-2. The two mirror driving parts 3-2 are connected to part of the comb teeth on the right side of the mirror surface 3, and this part of the comb teeth is used as a movable tooth corresponding to the fixed teeth of the inner frame 2 to form an inner drive comb tooth group 9-2, and the mirror surface feedback part 3-1 Connected with the middle comb, the...

technical field

[0001] The invention relates to the field of micro-electro-mechanical systems, in particular to a two-dimensional electrostatic scanning micromirror that can feed back angles in real time and is manufactured based on MEMS processing technology. Background technique

[0002] MEMS refers to Micro-Electro-Mechanical System (Micro-Electro-Mechanical System), which is a revolutionary new technology developed on the basis of microelectronics technology. Electromechanical devices. MEMS devices are widely used in high-tech industries and are a key technology related to technological development, economic prosperity and national defense security. Among them, the scanning micromirror is a light reflective device developed by using MEMS technology. By connecting the twisted structure of the mirror surface, under the action of the micro driving force, the mirror surface is deflected to realize the reflection of the beam in one or two dimensions. Scanning has the advant...

Examples

Embodiment 1

[0036] Such as figure 1 and figure 2 As shown, the two-dimensional electrostatic scanning micromirror of the present invention is based on silicon material and includes an outer frame 1, an inner frame 2 and a mirror surface 3, and the mirror surface 3 is square. The outer frame 1 and the inner frame 2 are connected together by two outer torsion beams 4, and the inner frame 2 and the mirror surface 3 are connected by two inner torsion beams 5, and the directions of the inner torsion beams 5 and the outer torsion beams 4 vertical. The mirror surface 3 can deflect around the inner torsion beam 5 as the axis, and the inner frame 2 and the mirror surface 3 can deflect around the outer torsion beam 4 as the axis, thereby realizing the deflection of the mirror surface 3 in two perpendicular directions.

[0037] Four outer frame isolation grooves 6 are processed on the outer frame 1, and the outer frame isolation groove 6 divides the outer frame 1 into an outer frame measuring par...

Embodiment 2

[0043] Such as image 3 As shown, the outer frame 1 of this embodiment is divided into an outer frame measuring part 1 - 1 , an outer frame driving part 1 - 2 and an outer frame connecting part 1 - 3 by a plurality of outer frame isolation grooves 6 . The difference from Example 1 is that, if Figure 5 As shown, an outer frame isolation groove 6 of this embodiment is located at the position of the fixed teeth on one side of the outer frame 1, and the outer frame isolation groove 6 divides one side of the outer frame 1 into an outer frame measuring part 1-1 and an outer frame driving part 1-2, where the inner side of the outer frame measuring part 1-1 is connected to some static teeth, and the fixed teeth of this part and the movable teeth corresponding to the inner frame 2 form the outer feedback comb group 7-1; the inner side of the outer frame driving part 1-2 is connected to another A part of the static teeth and the movable teeth corresponding to the inner frame 2 form th...

Embodiment 3

[0048] Such as Figure 6 As shown, the mirror isolation groove 8 on the left side of the mirror 3 in this embodiment is the same as the first embodiment, and divides the mirror 3 into a mirror driving part 3-2 and a central part 3-3. The mirror isolation groove 8 on the right runs through the entire mirror surface, and the right side contains two branch isolation grooves, which are double T-shaped structures, and the right side of the mirror surface 3 is divided into three parts, the upper, middle and lower parts, which are the upper mirror driving part 3-2, The middle mirror feedback part 3-1 and the lower mirror driving part 3-2. The two mirror driving parts 3-2 are connected to part of the comb teeth on the right side of the mirror surface 3, and this part of the comb teeth is used as a movable tooth corresponding to the fixed teeth of the inner frame 2 to form an inner drive comb tooth group 9-2, and the mirror surface feedback part 3-1 Connected with the middle comb, the...

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