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Methods and apparatuses for wireless communication with a brush

A technology of brushes, wireless devices, applied in the field of wireless communication with brushes

Pending Publication Date: 2020-01-21
ILLINOIS TOOL WORKS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Conventional brushes received from the manufacturer are not in ready-to-use condition

Method used

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  • Methods and apparatuses for wireless communication with a brush
  • Methods and apparatuses for wireless communication with a brush
  • Methods and apparatuses for wireless communication with a brush

Examples

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Embodiment Construction

[0020] Various applications and processes can benefit from physical cleaning of object surfaces. For example, in semiconductor manufacturing, semiconductor wafers may be cleaned to remove potentially damaging contaminants during one or more stages of preparing electronic circuits on the wafer. For example, cleaning may be provided by brushes in contact with the surface to be cleaned. Conventional brushes are not received from the manufacturer in a ready-to-use condition. For example, a brush may have contaminants that prevent the object from being cleaned. Accordingly, it may be desirable to condition (condition, condition) the brush to remove contaminants to an acceptable level for the brush's intended use, and then use the conditioned brush to clean the surface. The brush can also be tracked to know how many times or how long the brush has been used to clean the surface.

[0021] While it is to be understood that various embodiments of the present disclosure may be used i...

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PUM

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Abstract

Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.

Description

[0001] related application [0002] This international application claims priority to U.S. Patent Application Serial No. 15 / 607,849, filed May 30, 2017, entitled "Methods and Apparatuses for Wireless Communication with a Brush." The entire contents of US Patent Application Serial No. 15 / 607,849 are incorporated herein by reference. Background technique [0003] The present disclosure relates to wireless communications, and more particularly, to methods and devices for wirelessly communicating with brushes. [0004] In the semiconductor manufacturing industry and other industries, brushes are used to remove contaminants from surfaces (eg, from semiconductor wafers). Conventional brushes are not received from the manufacturer in a ready-to-use condition. Rather, brushes are typically conditioned (or "conditioned") prior to use on the intended product. [0005] Limitations and disadvantages of conventional methods of adjusting and using brushes will become apparent to those sk...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67011H01L21/67046H01L21/67294A46B13/02A46B15/001H04W4/80B08B1/12
Inventor 布拉德利·斯科特·威瑟斯科里·艾伦·休斯埃里克·斯科特·纳尔逊史蒂芬·肯尼斯·克里斯蒂布伦特·艾伦·贝斯特
Owner ILLINOIS TOOL WORKS INC