Unlock instant, AI-driven research and patent intelligence for your innovation.

Evaporation device and control method thereof

A control method and evaporation technology, which is applied in the field of evaporation, can solve the problem that the evaporation device cannot continue the evaporation service life, and achieve the effect of avoiding damage

Active Publication Date: 2022-03-29
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides an evaporation device and its control method to solve the technical problem that the evaporation device cannot continue to evaporate and has a short service life

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Evaporation device and control method thereof
  • Evaporation device and control method thereof
  • Evaporation device and control method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0012] The following will clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0013] Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The occurrences of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the embodiments ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The application discloses an evaporation device and its control method. The evaporation device includes: an evaporation box, a feeding box, a switch, a crucible, and a feeding mechanism. The evaporation box is provided with an evaporation chamber; the feeding box There is a transition chamber, and the feeding box is also provided with a through hole connecting the evaporation chamber and the transition chamber; the switch is connected with the feeding box, and the switch is used to control the closing and opening of the through hole; the crucible is assembled in the evaporation chamber, and the crucible It is used to hold and heat raw materials; the feeding mechanism is assembled in the feeding box, and the feeding mechanism is used to add raw materials to the crucible; wherein, when the evaporation device performs evaporation, the evaporation chamber and the transition chamber are mutually Connected and in a vacuum state; when the feeding mechanism is feeding, the evaporation chamber and the transition chamber are isolated from each other. The vapor deposition device of the present application can realize the continuation of the coating process.

Description

technical field [0001] The present application relates to the technical field of evaporation, in particular to an evaporation device and a control method thereof. Background technique [0002] At present, there are many ways to make upper display screens in the market, among which organic light-emitting diodes (OLED) will be the mainstream technology in the future. There are three mainstream ways to make OLED devices in the market: evaporation, inkjet printing (IJP), and thermal transfer. Among them, the vapor deposition method is relatively mature and widely used, and it has been mass-produced. The vapor deposition metal cathode is a necessary equipment for making OLEDs in different ways. [0003] The current evaporation equipment for evaporating metal materials is mainly a point source evaporation method, and the evaporation method is a line source composed of multiple point source crucibles; no matter whether it is a single point source or a line source composed of multip...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/14C23C14/54C23C14/56
CPCC23C14/24C23C14/14C23C14/54C23C14/56
Inventor 谭伟
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD