Unlock instant, AI-driven research and patent intelligence for your innovation.

Blue light micro-LED device with controllable emission direction based on mems scanning micromirror and preparation method thereof

A technology of LED devices and scanning micromirrors, used in optical components, semiconductor devices, optics, etc.

Active Publication Date: 2021-04-27
NANJING UNIV OF POSTS & TELECOMM
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, a major bottleneck restricting the application of visible light wireless communication technology is the miniaturization and miniaturization of transceivers and signal processing modules.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Blue light micro-LED device with controllable emission direction based on mems scanning micromirror and preparation method thereof
  • Blue light micro-LED device with controllable emission direction based on mems scanning micromirror and preparation method thereof
  • Blue light micro-LED device with controllable emission direction based on mems scanning micromirror and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:

[0034] Such as Figure 1-3 As shown, the present invention has designed a blue light micro-LED device based on MEMS scanning micromirror with controllable emission direction, and the realization carrier is a sapphire substrate nitride wafer 1 and an SOI wafer 2, and the sapphire substrate nitride wafer is separated from the sapphire by laser lift-off technology. The substrate is peeled off, the top nitride and nickel / gold electrodes 3 form an array micro LED device, and the top layer of the SOI wafer 2 is provided with a MEMS scanning micromirror 4;

[0035] The sapphire substrate nitride wafer 1 and the SOI wafer 2 are bonded and connected by anodic bonding technology;

[0036] The sapphire substrate nitride wafer 1 is completely peeled off the sapphire substrate by laser lift-off technology, and the top layer of the wafer has an array of micro L...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a blue-light micro-LED device with controllable emission direction based on MEMS scanning micromirror and its manufacturing method. Including the top nitride and the sapphire substrate layer under the top nitride, the sapphire substrate layer is peeled off by laser lift-off technology, the top nitride and nickel / gold electrodes form an array micro LED device, the top layer of the SOI wafer is equipped with MEMS scanning micro mirror, and integrate the scanning micromirror with the micro LED through the anode bonding technology. The invention integrates the array micro LED on the MEMS micromirror, which can be used as a light source for visible light communication or display, and can also be used as a photoelectric receiving module in visible light communication. .

Description

technical field [0001] The invention relates to an LED device, specifically a method for preparing a micro-LED device, and belongs to the technical field of information materials and devices. Background technique [0002] As a cold light source, LED light source has great advantages over traditional fluorescent lamps and incandescent lamps in terms of operating voltage, energy consumption, illuminance, and working life. Based on the calculation of electric energy consumption for six hours per day, considering the cost of light bulbs, service life and electricity charges, compared with incandescent lamps, halogen lamps, and energy-saving lamps, LED lamps have the lowest total expenditure for 20 years. And the longer the lighting time, the more obvious the cost advantage of LED light source. As a new type of lighting source, LED lights have the characteristics of energy saving, health, environmental protection and long service life. [0003] Visible light communication is a ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L33/06H01L33/32H01L33/20H01L33/00B81B7/04
CPCB81B7/04H01L33/0075H01L33/06H01L33/20H01L33/32
Inventor 李欣蒋成伟沙源清王永进
Owner NANJING UNIV OF POSTS & TELECOMM