Galvanometer and laser radar

Abstract

The invention discloses a galvanometer and a laser radar, and the galvanometer comprises a fixed seat, a galvanometer drive frame which comprises a fast-axis support, a slow-axis support and a fast-axis frame, a reflector is installed in the fast-axis frame of the fast-axis support, the fast-axis support is connected in the slow-axis support, and the galvanometer drive frame is rotatingly connected in the fixed seat; the fast shaft frame twists around a first direction, and the slow shaft frame twists around a second direction; the slow shaft driving assembly comprises a motor and a cam; the cam is connected with the motor, the edge of the cam abuts against the side face of one end of the slow-axis support, and the motor drives the cam to rotate in the second direction and drives the slow-axis support to rotate in the second direction. Therefore, the reliability of the galvanometer can be improved, the vibration and impact resistance of the galvanometer is improved, and the service life of the laser radar is prolonged.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of laser radar, and in particular, to a vibrating mirror and laser radar. Background technique [0002] Lidar is a radar system that emits laser beams to detect the position, speed and other characteristic quantities of target objects. With the development of lidar, micro-electro-mechanical system (Micro-Electro-Mechanical System, MEMS) vibrating mirror (also referred to as "vibrating mirror" in this article) is applied to lidar, and the development of solid-state lidar has become the focus of lidar in recent years. Develop new trends. MEMS oscillating mirror is a kind of micromirror made by MEMS technology. Its working mode is mostly resonant mode, which has the advantages of small size, high oscillation frequency, and no rotating parts. [0003] In general, solid-state LiDAR favors electromagnetic MEMS galvanometers and MEMS-like galvanometers. Electromagnetic MEMS vibrating mirror...

AI Technical Summary

Problems solved by technology

However, this kind of torsion beam has low stiffness, and it is prone to stress concentration in the external vibration environment and exceeds the stress limit of the material, resulting in damage to the MEMS vibrating mirror; or, due to the low stiffness, the MEMS vibrating mirror is easily affected by vibration

As a result, the reliability of the MEMS galvanometer is poor, and it is easily damaged by vibration or shock, resulting in a short life of the lidar

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