Complementary plasma generating circuit, control method and plasma generator
A technology for generating circuits and plasma electrodes, applied in the direction of plasma, electrical components, etc., can solve problems such as arcing, and achieve the effect of avoiding arcing
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Embodiment 1
[0023] Embodiment 1, a complementary plasma generating circuit.
[0024] as attached figure 1 And attached figure 2 As shown, a complementary plasma generating circuit of this embodiment includes multiple pairs of plasma electrodes, a control module, and multiple booster circuits, each pair of plasma electrodes includes a first electrode and a second electrode, and the first electrode and the The second electrodes are all connected to the I / O port of the control module through the corresponding boost circuit.
[0025] Among them, the complementary plasma generating circuit can have any pair of plasma electrodes, and each electrode of each pair of plasma electrodes has a corresponding boost circuit, and each plasma electrode is connected to the I / O port of the control module through the corresponding boost circuit , since the circuit structure of each booster circuit is the same, this embodiment uses a pair of plasma electrodes as an example for illustration.
[0026] The c...
Embodiment 3
[0040] Embodiment 3, a kind of plasma generator.
[0041] This embodiment provides a plasma generator, which includes the complementary plasma generating circuit described in Embodiment 1.
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