Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application

Abstract

The invention belongs to the field of sensor design and manufacturing, and particularly discloses a multifunctional flexible metamorphic sensor with a single metal layer electrode, a preparation method and application thereof. The sensor comprises a metal functional layer and a flexible substrate. The metal functional layer comprises a first strain grid, a first interdigital electrode, a first lead and a second lead; the first strain grid comprises M S-shaped structures which are sequentially connected end to end and arranged in parallel; and the first interdigital electrode comprises M interdigital structures arranged in parallel. The preparation method comprises the steps of preparation of a substrate layer and a sacrificial layer, preparation of a metal functional layer and stripping ofa sensor. The multifunctional flexible metamorphic sensor can be applied to measurement of temperature, strain, flow velocity and humidity. According to the invention, multifunctional small-size in-situ sensing can be realized through variable topology switching between the leads; meanwhile, variable topology multi-modal metamorphic sensing of a few pins can be realized; and two principles can beadopted for measurement, mutual complementation and verification, so that the robustness and stability of the system are improved.

Description

technical field [0001] The invention belongs to the field of sensor measurement, and more specifically relates to a multifunctional flexible metamorphic sensor with a single metal layer electrode, a preparation method and an application. Background technique [0002] In systems such as human health monitoring, human-computer interaction, wind tunnel measurement, and aerospace smart skin, sensor devices play an important role. Temperature, deformation, flow field, and humidity are important factors that affect human health and body health. If the temperature is too high, it will affect the electronic system of the aircraft, large deformation will cause cracks in the airframe, the flow field will affect the efficiency of the airframe, and humidity will accelerate the corrosion of parts. Similarly, for electronic skin, body surface temperature, tension, respiratory system and environmental flow field, body surface humidity, etc. are also related to the health and comfort of th...

AI Technical Summary

Problems solved by technology

The sensor has fewer features, high pin count and poor robustness

Wang et al. used epidermal electronics to collect signals such as temperature, humidity, and ECG on the same surface (Wang Y, Qiu Y, Ameri S K, et al. Low-cost, μm-thick, tape-free electronic tattoo sensors with minimized motion and sweat artifacts[J].npj Flexible Electronics), but this kind of acquisition method has a large area, a large amount of leads used, and the metal pattern is easily damaged, resulting in the failure of the entire function, and poor robustness

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