Wafer mounting base capable of preventing wafer from shaking and deviating and wafer lifting device

A mounting seat and wafer technology, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve problems such as polluted wafers, wafer damage in boxes, etc., to reduce damage rate, simple structure, and reduce production costs Effect
CN110993544AActive Publication Date: 2020-04-10PNC PROCESS SYSTEMS CO LTD +1
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
PNC PROCESS SYSTEMS CO LTD
Publication Date
2020-04-10

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Abstract

The invention discloses a wafer mounting base capable of preventing a wafer from shaking and deviating and a wafer lifting device. The wafer mounting base comprises a base and clamping plates, the clamping plates are buckled on the two sides of the base and locked and fixed to the base through fasteners, tooth groove structures are arranged at the upper ends of the clamping plates, and each toothon each tooth groove structure is provided with a tooth back, a tooth front and a tooth tip formed at the intersection of the tooth back and the tooth front. The wafer mounting base is simple in structure and convenient to use, the wafers can be prevented from shaking or deviating in the wafer moving process by arranging the special tooth groove structures on the clamping plates, the breakage rateof the wafers is greatly reduced, the broken wafers are prevented from polluting other unbroken wafers or polluting production line equipment, and the production cost of enterprises is reduced.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a wafer mounting seat and a wafer lifting device for avoiding wafer shaking and offset. Background technique

[0002] With the continuous support of national policies and funds, the continuous and high-intensity R&D investment of localized equipment and the independent mastery of core technologies are increasing. Among them, the load, movement of semiconductor wafers or the placement required for the use of process flow The application design and technical concepts of wafer or batch wafer and other related components and module devices applied to various process flows emerge as needed.

[0003] The wafer mounting seat is used to place a single wafer or a batch of wafers on the mounting seat by clamping or holding. However, during the movement of the wafer mounting seat, due to the impact of external force, the wafer mounting seat will The wafers in the casset...

Claims

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