Novel piezoelectric rotation precision driving platform based on parasitic inertia principle

A driving platform and principle technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc. The large stiffness is not fully utilized, etc., to achieve the effect of improving the output load, high work efficiency, stable and efficient movement

Pending Publication Date: 2020-04-10
ZHEJIANG NORMAL UNIVERSITY
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AI Technical Summary

Problems solved by technology

However, piezoelectric elements, such as piezoelectric stacks, usually use the d33 working mode, which has a small stiffness in the section perpendicular to the main output direction, and the resulting preload is small, resulting in the overall device The output load is greatly reduced, and the large stiffness of the piezoelectric element in the main output direction is not fully utilized

Method used

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  • Novel piezoelectric rotation precision driving platform based on parasitic inertia principle
  • Novel piezoelectric rotation precision driving platform based on parasitic inertia principle
  • Novel piezoelectric rotation precision driving platform based on parasitic inertia principle

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Embodiment Construction

[0020] The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.

[0021] see Figure 1 to Figure 4 As shown, a new piezoelectric rotary precision drive platform based on the principle of parasitic inertia mainly includes a rotor (1), a piezoelectric stack (2), a pre-tightening wedge (3), a pre-tightening screw (4), an asymmetric A thin-walled flexible hinge mechanism (5) and a base (6). The rotor (1) includes a rotary table, a bearing, and a rotary shaft. The rotary table and the outer ring of the bearing, the rotary shaft and the inner ring of the bearing, and the rotary shaft and the base are interference fits; the structure of the rotor (1) uses high-precision bearings to reduce the Its friction loss, the bearing is connected with the base through the rotating shaft; the asymmetric thin-walled flexible hinge mechanism (5) is installed on the base through screws; the piezoele...

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Abstract

The invention relates to a piezoelectric rotation precision driving platform based on a parasitic inertia principle. The piezoelectric rotation precision driving platform is composed of a piezoelectric stack, an asymmetric thin-wall type flexible hinge mechanism, a rotor, a pre-tightening screw, a pre-tightening wedge block and a base. The piezoelectric stack can be extended and recovered under the driving of voltage signals, and the asymmetric thin-wall type flexible hinge mechanism can realize parasitic inertial motion; the pre-tightening screw is used for adjusting the initial pre-tightening force between the asymmetric thin-wall type flexible hinge mechanism and the rotor; and the base supports, installs and fixes other parts. The main output direction of the piezoelectric stack and the rotation center of the rotor are on the same straight line, and the rigidity of the piezoelectric stack in the main output direction is fully utilized; and the asymmetric thin-wall type flexible hinge mechanism is good in rigidity and capable of bearing large loads, and the output loads of the driving platform are increased. The output load of the driving platform is improved. The platform can achieve rotary stepping motion in a certain direction and can be applied to the technical fields of precision and ultra-precision machining, micro electro mechanical systems, micro-operation robots, large-scale integrated circuit manufacturing and biology.

Description

technical field [0001] The invention relates to the fields of precision ultra-precision machining, micro-nano manipulating robots, and micro-electromechanical system engineering, and in particular to a novel piezoelectric rotary precision drive platform based on the principle of parasitic inertia. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro / nano-level output accuracy, the application of modern precision drive technology puts forward higher requirements for the accuracy of the drive device. The traditional driving device has low output accuracy and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving device in the precision system of modern advanced technology. Piezoelectr...

Claims

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Application Information

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IPC IPC(8): H02N2/10
CPCH02N2/101
Inventor 万嫩李建平温建明阚君武陈松
Owner ZHEJIANG NORMAL UNIVERSITY
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