Novel efficient piezoelectric rotation precision driving platform based on asymmetric triangular arc type flexible hinge mechanism

Abstract

The invention relates to a novel efficient piezoelectric rotation precision driving platform based on an asymmetric triangular arc type flexible hinge mechanism. The novel efficient piezoelectric rotation precision driving platform is composed of two sets of piezoelectric stacks, two sets of asymmetric triangular arc type flexible hinge mechanisms, a rotor, a pre-tightening screw, a pre-tighteningwedge block and a base. Each piezoelectric stack can be extended and recovered under the driving of a voltage signal; the two groups of asymmetric triangular arc type flexible hinge mechanisms can realize parasitic inertial motion; the pre-tightening screw and the pre-tightening wedge block adjust the initial pre-tightening force between the asymmetric triangular arc type flexible hinge mechanismand the rotor. The base plays a role in supporting. According to the invention, the two piezoelectric stacks are alternately driven under the control of a voltage time sequence, so that the rotor rollback phenomenon can be eliminated, and the output performance of the platform is improved. The platform can drive the rotor to achieve efficient rotary motion, and can be applied to the technical fields of precision and ultra-precision machining, micro electro mechanical systems, micro operation robots, large-scale integrated circuit manufacturing and biology.

Description

technical field [0001] The invention relates to the fields of precision ultra-precision machining, micro-nano manipulating robots, and micro-electromechanical system engineering, and in particular to a novel high-efficiency piezoelectric rotary precision drive platform based on an asymmetrical triangular-arc flexible hinge mechanism. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro / nanometer output precision, the application of modern precision drive technology puts forward higher requirements for the precision of the drive platform. The traditional driving platform has low output precision and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving platform in the precision syste...

AI Technical Summary

Problems solved by technology

Piezoelectric elements, however, such as piezo stacks, typically use d 33 In the working mode, the rigidity of the section perpendicular to the main output direction is small, and the pre-tightening force generated is small, resulting in a large reduction in the output load of the overall platform, and the large stiffness of the piezoelectric element in the main output direction has not been fully utilized. Utilization; a single piezo stack provides low output load; back-off phenomenon in motion further degrades output performance

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