Rotary piezoelectric driving device based on asymmetric triangular hinge mechanism

Abstract

The invention relates to a rotary piezoelectric driving device based on an asymmetric triangular hinge mechanism. The device consists of a piezoelectric stack, the asymmetric triangular hinge mechanism, a rotor, a pre-tightening screw, a pre-tightening wedge and a base. The piezoelectric stack can be elongated and recovered under the drive of a voltage signal. The asymmetric triangular hinge mechanism can realize parasitic inertia motion. The pre-tightening screw and the pre-tightening wedge adjust the initial pre-tightening force between the asymmetric triangular hinge mechanism and the rotor. The base acts as a support. The main output direction of the piezoelectric stack is on a straight line with the rotation center of the rotor so that the rigidity of the main output direction of thepiezoelectric stack can be fully utilized. The asymmetric triangular hinge mechanism has a simple structure and good stiffness output performance and can bear high load and greatly improves the outputload of the driving device and can realize the rotating stepping movement of the rotor. The device can be applied to the fields of precision ultra-precision machining, micro-electromechanical systems, micro-operation robots, large-scale integrated circuit manufacturing and biotechnology.

Description

technical field [0001] The invention relates to the fields of precision ultra-precision machining, micro-nano manipulating robots, and micro-electromechanical system engineering, and in particular to a rotary piezoelectric drive device based on an asymmetrical triangular hinge mechanism. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro / nano-level output accuracy, the application of modern precision drive technology puts forward higher requirements for the accuracy of the drive device. The traditional driving device has low output accuracy and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving device in the precision system of modern advanced technology. Piezoelectric ceramic...

AI Technical Summary

Problems solved by technology

However, piezoelectric elements such as piezoelectric stacks usually adopt the d33 working mode, which has a small stiffness in the section perpendicular to the main output direction, and the pre-tightening force generated is small, resulting in a large reduction in the output load of the overall device. Piezoelectric The greater stiffness of the element in the main output direction is not fully utilized

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