Umbrella-shaped crawling type piezoelectric driving platform

Abstract

The invention relates to an umbrella-shaped crawling type piezoelectric driving platform. The platform comprises two groups of same piezoelectric driving units, a rotor and a base, wherein each groupof piezoelectric units comprises a piezoelectric stack, an umbrella-shaped flexible hinge mechanism, a pre-tightening screw, a pre-tightening wedge block and a spiral micrometer head, the piezoelectric stack can extend and recover under the driving of a voltage signal, the umbrella-shaped flexible hinge mechanism can realize parasitic inertial motion, the pre-tightening screw and the spiral micrometer head can adjust the initial pre-tightening force between the umbrella-shaped flexible hinge mechanism and the rotor, the base supports other parts, the two sets of piezoelectric driving units work alternately, and crawling type movement can be achieved through parasitic inertia movement of the umbrella-shaped flexible hinge mechanism. The platform is advantaged in that the platform can be applied to the technical fields of precision and ultra-precision machining, micro electro mechanical systems, micro operation robots, large-scale integrated circuit manufacturing and biology.

Description

Technical field [0001] The invention relates to the fields of precision and ultra-precision machining, micro-nano operation robots, and micro-electromechanical systems, in particular to an umbrella-shaped crawling piezoelectric drive platform. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-end science and technology fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, and aerospace technology. In order to achieve micro / nano-level output accuracy, the application of modern precision drive technology puts forward higher requirements for the accuracy of the drive platform. The traditional drive platform has low output accuracy and large overall size, which cannot meet the requirements of modern advanced technology for micro / nano-level high precision and small drive platform size. The piezoelectric drive platform has the advantages of small size, high ...

AI Technical Summary

Problems solved by technology

The traditional driving platform has low output precision and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving platform in the precision system of modern advanced technology.

The piezoelectric drive platform has the advantages of small size, high displacement resolution, large output load, high energy conversion rate, etc., and can achieve micro / nano-level output accuracy, and has been increasingly used in micro-positioning and precision ultra-precision machining However, its working stroke is very limited due to the inverse piezoelectric effect of a single piezoelectric element, which greatly limits its application.

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