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Umbrella-shaped piezoelectric driving device

A piezoelectric drive and piezoelectric stacking technology, which is applied in the direction of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc., can solve the problem of volume size, displacement resolution, output load and large energy Problems such as the conversion rate, the inability to meet the requirements of small size, and the limited inverse piezoelectric effect can achieve the effect of improving the complex structure, unreliable performance, and good stiffness output performance.

Inactive Publication Date: 2020-02-21
ZHEJIANG NORMAL UNIVERSITY
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  • Abstract
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AI Technical Summary

Problems solved by technology

The traditional driving device has low output accuracy and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving device in the precision system of modern advanced technology.
Piezoelectric drive devices have the advantages of small size, high displacement resolution, large output load, and high energy conversion rate, and can achieve micro / nano-level output accuracy, and have been increasingly used in micro-positioning and precision ultra-precision machining However, its working stroke is very limited due to the inverse piezoelectric effect of a single piezoelectric element, which greatly limits its application.

Method used

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  • Umbrella-shaped piezoelectric driving device
  • Umbrella-shaped piezoelectric driving device
  • Umbrella-shaped piezoelectric driving device

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Embodiment Construction

[0021] The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.

[0022] see Figure 1 to Figure 3 As shown, an umbrella-type piezoelectric driving device mainly includes a mover (1), a piezoelectric stack I (2), a piezoelectric stack II (3), a pre-tightening wedge (4), a pre-tightening screw ( 5), spiral micrometer head (6), umbrella type flexible hinge mechanism (7) and base (8). The mover (1) adopts a high-precision linear guide rail with a slider, and the guide rail is fixed on the base (8) by screws; the umbrella-shaped flexible hinge mechanism (7) is installed on the base (8) by screws; the piezoelectric stack I (2) and the piezoelectric stack II (3) are installed in the umbrella-shaped flexible hinge mechanism (7), and its main output direction is arranged perpendicular to the moving direction of the mover (1); the pre-tightening wedge (4) is arranged on the piezoelectri...

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Abstract

The invention relates to an umbrella-shaped piezoelectric driving device. The device comprises a piezoelectric stack, an umbrella-shaped flexible hinge mechanism, a rotor, a pre-tightening screw, a pre-tightening wedge block, a spiral micrometer head and a base, wherein the piezoelectric stack can extend and recover under the driving of a voltage signal, the umbrella-shaped flexible hinge mechanism can realize parasitic inertial motion, the pre-tightening screw and the spiral micrometer head can adjust the initial pre-tightening force between the umbrella-shaped flexible hinge mechanism and the rotor, and the base supports other parts. The umbrella-shaped flexible hinge mechanism is simple in structure and capable of bearing large loads, and linear motion two-way driving can be achieved through the parasitic inertia motion of the umbrella-shaped flexible hinge mechanism, the device can be applied to the technical field of precision and ultra-precision machining, micro-electromechanicalsystems, micro-operation robots, large-scale integrated circuit manufacturing and biology.

Description

technical field [0001] The invention relates to the fields of precision ultra-precision machining, micro-nano operation robot and micro-electro-mechanical system engineering, in particular to an umbrella-type piezoelectric drive device. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro / nano-level output accuracy, the application of modern precision drive technology puts forward higher requirements for the accuracy of the drive device. The traditional driving device has low output accuracy and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving device in the precision system of modern advanced technology. Piezoelectric drive devices have the advantages of small size, high displ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02H02N2/04
CPCH02N2/021H02N2/04H02N2/043
Inventor 万嫩李建平温建明
Owner ZHEJIANG NORMAL UNIVERSITY
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