The present invention relates to a piezoelectric rotary precision driving platform based on the parasitic
inertia principle, comprising two piezoelectric stacks, two asymmetric thin-walled flexible hinge mechanisms, a rotor, a pre-tightening screw, a pre-tightening wedge and a base. The two groups of piezoelectric stacks can be extended and restored under the drive of a
voltage signal; the two groups of asymmetric thin-walled flexible hinge mechanisms can realize parasitic
inertial motion; the pre-tightening screws and the pre-tightening wedges adjust the initial pre-tightening force between the asymmetric thin-walled flexible hinge mechanism and the rotor; the base plays a supporting role. Under the timing control of the
voltage, the two piezoelectric stacks of the present invention alternately provide drive, so that the two groups of asymmetric thin-walled flexible hinge mechanisms alternately drive the rotor to rotate, which not only increases the output load, but also eliminates the retreat phenomenon of the rotor within the motion cycle, improves the output performance of the device, and realizes the efficient rotation of the rotor. The platform can be applied to precision and ultra-precision
machining, micro-electromechanical systems, micro-manipulation robots, large-scale
integrated circuit manufacturing, and
biotechnology.