Novel bionic creeping type piezoelectric precision driving device based on parasitic inertia principle

Abstract

The invention relates to a novel bionic creeping type piezoelectric precision driving device based on a parasitic inertia principle. The device comprises piezoelectric stacks, an asymmetric thin-walltype flexible hinge mechanism, a rotor, a pre-tightening screw, a pre-tightening wedge block and a base; the piezoelectric stacks can be stretched and recovered under the drive of a voltage signal; the asymmetric thin-wall flexible hinge mechanism can realize parasitic inertial motion; the pre-tightening screw adjusts the initial pre-tightening force between the asymmetric thin-wall flexible hingemechanism and the rotor; and the base plays a supporting role. The two piezoelectric stacks alternately provide drive under the time sequence control of voltage, so that the asymmetric thin-wall flexible hinge mechanism performs bionic crawling motion, the output load is increased, the backspacing phenomenon of the rotor in the motion period is eliminated, the output performance of the device isimproved, and the efficient linear motion of the rotor is realized. The platform can be applied to the fields of precision ultra-precision machining, micro electro mechanical systems, micro operationrobots, large-scale integrated circuit manufacturing and biotechnology.

Description

technical field [0001] The invention relates to the fields of precision ultra-precision machining, micro-nano manipulating robots, and micro-electromechanical system engineering, and in particular to a novel bionic crawling piezoelectric precision driving device based on the principle of parasitic inertia. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro / nano-level output accuracy, the application of modern precision drive technology puts forward higher requirements for the accuracy of the drive device. The traditional driving device has low output accuracy and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving device in the precision system of modern advanced technology. Pi...

AI Technical Summary

Problems solved by technology

Piezoelectric elements, however, such as piezo stacks, typically use d 33 In the working mode, the stiffness of the section perpendicular to the main output direction is small, and the pre-tightening force generated is small, resulting in a large reduction in the output load of the overall device, and the large stiffness of the piezoelectric element in the main output direction has not been fully utilized. Utilization; a single piezo stack provides low output load; back-off phenomenon in motion further degrades output performance

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