Method for improving defect detection resolution of high-reflection optical element
An optical component and defect detection technology, applied in the field of optical detection, can solve problems such as limited resolution, achieve the effect of improving detection accuracy and resolution, and eliminating the spot size
Inactive Publication Date: 2020-04-14
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology
However, in the traditional optical cavity ring down technology, the spot size of the detection beam is generally larger than the defect size, which limits the resolution of defect detection.
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[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.
[0028] A method for improving the detection resolution of defects in highly reflective optical components, applied to terminal equipment, reference figure 1 , the method includes:
[0029] S101. Obtain a reflectance distribution measurement map of the highly reflective optical element by using optical cavity ring down technology;
[0030] The embodiments of the present invention aim at the reflectivity distribution measur...
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The invention provides a method for improving the defect detection resolution of a high-reflection optical element. The method comprises the following steps: acquiring a reflectivity distribution measurement diagram of a high-reflection optical element by adopting an optical cavity ring-down technology; and carrying out deconvolution restoration on a reflectivity distribution measurement graph through an improved deconvolution algorithm to eliminate the influence of a light spot size and acquiring a high-resolution true value of the reflectivity distribution of the high-reflectivity optical element to detect defects accurately. Compared with the traditional optical cavity ring-down optical element defect detection technology, the provided method has the advantages that the reflectivity distribution diagram is recovered by adopting a deconvolution method, and finally, an optical element reflectivity distribution true value result with higher resolution is obtained, so that the detectionprecision is improved.
Description
technical field [0001] The invention relates to the technical field of optical detection, in particular to a method for improving the detection resolution of high reflection optical element defects. Background technique [0002] Precision highly reflective optical components are widely used in various industrial fields. Highly reflective optical components, especially optical film layers, due to the material itself and the coating process, there are various defects in the film layer, and the defects are distributed in a certain way and density in the film layer. These defects often lead to high reflective optical components. The main cause of laser damage. The rapid development of high-power laser technology has put forward very high requirements for the two-dimensional distribution of reflectivity and defect detection of highly reflective optical components. Therefore, it is necessary to study the defect detection of highly reflective optical components and find ways to i...
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Login to View More IPC IPC(8): G01N21/95G06T7/00
CPCG01N21/95G01N2021/9511G06T7/0004
Inventor 郭小红李斌成王静
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA