Bulk acoustic wave resonator, filter and electronic equipment with temperature filling layer and electrical layer

Abstract

The invention discloses a bulk acoustic wave resonator. The bulk acoustic wave resonator comprises a substrate; an acoustic mirror; a bottom electrode; a top electrode; the piezoelectric layer is arranged between the bottom electrode and the top electrode, and an overlapping area of the top electrode, the piezoelectric layer, the bottom electrode and the acoustic mirror in the thickness directionof the resonator forms an effective area of the resonator; the top electrode and / or the bottom electrode is a temperature compensation layer electrode; the temperature compensation layer electrode comprises an electrode material layer, at least one temperature compensation layer and at least one electrical layer. The temperature compensation layer and the electrical layer are superposed in the thickness direction of the resonator; in the thickness direction of the temperature compensation layer electrode, one of the temperature compensation layers in the temperature compensation layer electrode is closer to the piezoelectric layer than all the electrical layers, the electrical layers are electrically connected with the electrode material layer, the electrical resistivity of the electricallayers is different from the electrical resistivity of the electrode material layer, and all the temperature compensation layers are spaced apart from the piezoelectric layer in the thickness direction of the resonator. The invention further discloses a filter with the resonator and electronic equipment with the filter or the resonator.

Description

Technical field [0001] The present invention relates to the field of semiconductors, and in particular to a bulk acoustic wave resonator, a filter, and an electronic device with the resonator or the filter. Background technique [0002] As the basic element of electronic equipment, electronic devices have been widely used, and their applications include mobile phones, automobiles, home appliances, etc. In addition, technologies such as artificial intelligence, Internet of Things, and 5G communications that will change the world in the future still need to rely on electronic devices as their foundation. [0003] Film Bulk Acoustic Resonator (FBAR, also known as Bulk Acoustic Resonator, also known as BAW) as an important member of piezoelectric devices is playing an important role in the field of communications, especially FBAR filters in radio frequency filters The market share in the field is increasing. FBAR has excellent characteristics such as small size, high resonance frequen...

AI Technical Summary

Problems solved by technology

[0007] However, if a resonator with a temperature compensation layer is installed in the electrode, other electrical properties (such as Q value, etc.) will deteriorate, so it is necessary to improve other electrical properties (such as Q value)

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