Magnetic flux testing device for 3D planar Hall chip

Abstract

The invention provides a magnetic flux testing device for a 3D planar Hall chip. The magnetic flux testing device comprises a 2D magnetic flux testing device and a Z-axis magnetic flux testing device,wherein the 2D magnetic flux testing device is mounted at a first station, and comprises a first testing clamp, a rotatable coil base, double coils, first golden fingers, a gear and a magnetic switch; the first testing clamp is used for accommodating a to-be-tested chip; the rotatable coil base is arranged around the first testing clamp; the double coils are parallel to each other and are arranged on the coil base; the first golden fingers are electrically connected with the first testing clamp; the gear is arranged between the coil base and a first testing bracket; the magnetic switch is connected with the gear by means of a belt; the Z-axis magnetic flux testing device is mounted at a second station, and comprises a second testing clamp, a single coil and second golden fingers; and thesingle coil is arranged on the second testing clamp in a surrounding manner. The magnetic flux testing device for the 3D planar Hall chip completes magnetic flux testing in three axial directions at the same time by means of one-time feeding of a manipulator, avoids the problem that the chip cannot be conveyed to the testing clamps, does not need to convey the chip to a sorting machine for testingagain, and improves the testing efficiency.

Description

Technical field [0001] The invention relates to a magnetic flux test device, in particular to a magnetic flux test device for a 3D planar Hall chip. Background technique [0002] The Hall sensor is a kind of magnetoelectric effect. When the current passes through the conductor in the magnetic field in the direction perpendicular to the external magnetic field, there will be a potential difference between the two end faces of the conductor perpendicular to the magnetic field and the current direction. The phenomenon is called the Hall effect. The Hall sensor is a kind of sensor that uses the Hall element to convert the measured physical quantity (such as current, magnetic field, displacement, pressure, etc.) into an electromotive force output based on the Hall effect principle. Its simple structure, small size, no contact, high reliability, easy to miniaturize, therefore, has been widely used in measurement technology. In the production process of Hall products, it is necessary ...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a magnetic flux testing device for a 3D planar Hall chip, to simultaneously complete three axial magnetic flux tests during chip testing, and to avoid the problem that the chip cannot be transported to the test fixture

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