Method for manufacturing wireless passive flexible pressure sensor based on LC resonance

Abstract

The invention belongs to the technical field of flexible pressure sensors, and particularly relates to a method for manufacturing a wireless passive flexible pressure sensor based on LC resonance. Themethod comprises the following steps: S1, printing an LC resonance circuit consisting of a planar spiral inductor and a planar interdigital capacitor on a flexible substrate; S2, coupling with a detection coil to generate resonant frequency; S3, when the pressure applied to the flexible substrate changes, causing the capacitance of the flexible substrate to change; and S4, changing the resonant frequency of the LC resonance circuit so as to realize wireless passive pressure detection. With application of the LC coupling mode, the sensor can realize wireless passive detection and is low in power consumption and long in service life; meanwhile, a polydimethylsiloxane (PDMS) flexible substrate is adopted so that the application in the aspects of wearable devices, electronic skin, medical detection and the like can be met; and the structure is simple and machining is easy.

Description

technical field [0001] The invention belongs to the technical field of flexible pressure sensors, and in particular relates to a manufacturing method of a wireless passive flexible pressure sensor based on LC resonance. Background technique [0002] Flexible pressure sensors have the characteristics of small size, high sensitivity, and large deformation tolerance, and are well applied in important fields such as electronic skin, medical detection, and wearable devices. The existing capacitive flexible pressure sensors have the advantages of high sensitivity and fast dynamic response, but they all adopt active structures and need to sputter metal electrodes on flexible substrates. In practical applications, there are low work efficiency, high maintenance costs and High energy consumption issues. Therefore, a wireless passive design is required to avoid the application shortcomings of the current wired structure sensor and expand the application range of the sensor. [0003]...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problems of low working efficiency, high maintenance cost and high energy consumption of the active flexible pressure sensor in practical application, and propose a kind of simple production, long service life, which can be widely used in electronic skin, wearable Design method of wireless passive flexible pressure sensor for equipment and medical detection

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