Epitaxial substrate and manufacturing method thereof

Abstract

The application discloses an epitaxial substrate, which includes: a substrate body; a plurality of bosses arranged on the substrate body in an array; a plurality of contact electrodes correspondingly arranged on the top of the bosses; a planarization layer covering On the area where the boss and the substrate body are not covered by the boss, the planarization layer is provided with a first through hole corresponding to the boss, so that the contact electrode is exposed through the first through hole; a plurality of pads are arranged in an array arranged on the planarization layer and electrically connected to the corresponding contact electrode through the first through hole, wherein the area of ​​the vertical projection of the pad on the substrate body is larger than the area of ​​the vertical projection of the contact electrode on the substrate body. The application also discloses a method for manufacturing the epitaxial substrate. Through the above method, the present application can improve the alignment success rate of the epitaxial substrate and the driving substrate.

Description

technical field

[0001] The present application relates to the field of display technology, in particular to an epitaxial substrate and a manufacturing method thereof. Background technique

[0002] In recent years, the semiconductor lighting technology has become more mature, the cost has been declining, and the industrial scale has become saturated, which provides a better light source for the development of LED display technology.

[0003] Micro-LED (Micro Light Emitting Diode) display technology has the advantages of high brightness, high response speed, low power consumption, and long life, and has become a research hotspot for people to pursue a new generation of display technology. However, Micro-LED display The screen technology is still very immature, and many manufacturing technical problems still need to be solved.

[0004] Due to the extremely small size of Micro-LED, the size of its electrode layer, passivation layer and other patterns is even smaller, which brin...

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