Photoresist stripping liquid waste liquid recovery system

A technology of waste liquid recovery and stripping liquid, applied in water/sludge/sewage treatment, water pollutants, heating water/sewage treatment, etc. The effect of reducing energy loss, accelerating heat dissipation, and increasing processing efficiency

Inactive Publication Date: 2020-05-19
ANQING XINXIANGRUI CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, the recovery and reuse of the photoresist stripping solution is mostly recovered after rectification of the primary regeneration solution of the photoresist stripping solution by rectification tower, and the gas phase condensation reflux in the rectification process is a more important one in the rectification process. However, most

Method used

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  • Photoresist stripping liquid waste liquid recovery system
  • Photoresist stripping liquid waste liquid recovery system

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0020] Example 1

[0021] Such as figure 1 As shown, a photoresist stripping liquid waste recovery system includes a reactor 1, a preheater 2, a first reboiler 3, a normal pressure, negative pressure distillation tower 4, a first condenser 5, and a second The condenser 7, the second pump body 9, the pressurized rectification tower 10, the second reboiler 11 and the first pump body 12, the overall rectification process in the present invention is like the invention with patent number CN105523598B. To repeat, the first condenser 5 and the second condenser 7 are both provided with a heat recovery cover 8. The heat recovery cover 8 is connected to the heat recovery device 6 through a heat transfer tube. The heat recovery cover 8 is used to collect the heat emitted by the condenser. Heat, and at the same time transfer the heat through the heat transfer tube to the heat recovery device 6 for storage and use;

[0022] The heat recovery cover 8 includes an outer shell, an insulating laye...

Example Embodiment

[0027] Example 2

[0028] Such as figure 1 As shown, a photoresist stripping liquid waste recovery system includes a reactor 1, a preheater 2, a first reboiler 3, a normal pressure, negative pressure distillation tower 4, a first condenser 5, and a second The condenser 7, the second pump body 9, the pressurized rectification tower 10, the second reboiler 11 and the first pump body 12, the first condenser 5 and the second condenser 7 are all provided with a heat recovery cover 8, The heat recovery cover 8 is connected to the heat recovery device 6 through a heat transfer tube;

[0029] The heat recovery cover 8 includes an outer shell, an insulating layer laid on the inner wall of the outer shell, and several heat collecting plates laid on the inner wall of the outer shell. The outer shell is arranged outside the first condenser 5 and the second condenser 7, and the heat collecting plate The heat emitted by the condenser can be collected, and the heat collecting plate can heat the...

Example Embodiment

[0034] Example 3

[0035] Such as figure 1 As shown, a photoresist stripping liquid waste recovery system includes a reactor 1, a preheater 2, a first reboiler 3, a normal pressure, negative pressure distillation tower 4, a first condenser 5, and a second The condenser 7, the second pump body 9, the pressurized rectification tower 10, the second reboiler 11 and the first pump body 12, the first condenser 5 and the second condenser 7 are all provided with a heat recovery cover 8, The heat recovery cover 8 is connected to the heat recovery device 6 through a heat transfer tube;

[0036] The heat recovery cover 8 includes an outer shell, an insulating layer laid on the inner wall of the outer shell, and several heat collecting plates laid on the inner wall of the outer shell. The outer shell is arranged outside the first condenser 5 and the second condenser 7, and the heat collecting plate The heat emitted by the condenser can be collected, and the heat collecting plate can heat the...

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Abstract

The invention relates to a photoresist stripping liquid waste liquid recovery system. The system comprises a reaction kettle, a preheater, a first reboiler, a normal-pressure rectifying tower, a negative-pressure rectifying tower, a first condenser, a second condenser, a second pump body, a pressurized rectifying tower, a second reboiler and a first pump body, wherein heat recovery covers are arranged on the first condenser and the second condenser, and the heat recovery covers are connected with a heat recovery device through heat transfer pipes. According to the photoresist stripping liquidwaste liquid recovery system disclosed in the invention, the heat recovery device is additionally arranged outside the condenser, heat emitted by the condenser is recycled while the heat dissipation speed of the condenser is increased, energy loss of the whole system is greatly reduced, meanwhile, the reaction kettle is arranged to be of two layers, two impurity removal procedures can be conductedat the same time when primary regeneration liquid is formed through stirring and filtering, the processing time is shortened, and the processing efficiency of the system is improved.

Description

technical field [0001] The invention belongs to the field of rectification tower recovery, and in particular relates to a high-efficiency and low-consumption photoresist stripping liquid waste recovery system. Background technique [0002] Along with the rapid development of domestic electronics manufacturing industry, the usage of electronic chemicals such as photoresist stripper also increases greatly. When the photoresist stripping solution is used in large quantities, a large amount of photoresist stripping solution waste is also produced. In addition to a small amount of polymer resin and photosensitizer, most of the photoresist stripping solution waste is reusable photoresist stripping solution, so it is urgent to recycle the photoresist stripping solution. [0003] The rectification tower is a tower-type vapor-liquid contact device for rectification. Utilizing the different volatility of each component in the mixture, that is, the property that the vapor pressure of...

Claims

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Application Information

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IPC IPC(8): C02F9/10C02F101/20
CPCC02F1/00C02F1/04C02F1/28C02F1/62C02F9/00C02F2101/20C02F2103/34
Inventor 李向峰高豹黄安宁李星星桂园芬余何建张晟煜
Owner ANQING XINXIANGRUI CHEM CO LTD
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