All-dielectric transmission type metasurface all-phase modulator
A transmissive, metasurface technology, applied in the field of micro-nano optics, which can solve the problems of low structural fault tolerance, blocking partial particle transmission, and low transmittance of phase regulators.
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[0021] see Figure 1 to Figure 5 , the present invention provides an all-dielectric transmission metasurface all-phase modulator 100, comprising a substrate 1, a coating 2 and periodically arranged particles 3; the coating 2 is fixedly connected to the substrate 1, and is located on the On one side of the substrate 1, the periodically arranged particles 3 are fixedly connected to the substrate 1 and located inside the coating 2; the periodically arranged particles 3 include horizontal arms 31 and vertical arms 32, the The horizontal arm 31 and the vertical arm 32 are fixedly connected to the substrate 1 and are located inside the coating 2. One end of the vertical arm 32 is fixedly connected to the horizontal arm 31, and the other end faces away from The direction of the horizontal arm 31 is T-shaped.
[0022] Further, the material of the horizontal arm 31 and the vertical arm 32 is GaAs, and the material of the coating 2 is BaF 2 , the material of the substrate 1 is SiO 2 ...
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