The invention discloses a SiN film for realizing super
lubrication on the surface of
engineering steel and a preparation method of the SiN film, and belongs to the field of
surface engineering and
tribology. According to the method, a HiPIMS / DC composite deposition technology is innovatively adopted, and the SiN film with a specific gradient structure, a uniform amorphous nanocrystalline composite phase and a narrow optimized
residual stress window (-0.71-0.23 GPa) is successfully prepared on a GCr15 and other conventional
engineering steel substrates only by accurately controlling the
flow ratio of Ar to N2 to be 4: 1 + / -0.5 (optimally 4: 1). The film shows excellent comprehensive performance, the
hardness is larger than or equal to 15 GPa, the obdurability is good (H / E is larger than or equal to 0.10), and stable super
lubrication can be achieved under the action of PEGP lubricants (the
friction coefficient is smaller than or equal to 0.01). According to the method, the inherent dependence of a super-
lubrication technology on a Si3N4
ceramic friction pair is broken through, the intrinsic super-lubrication function is achieved on the surface of cheap
engineering steel for the first time, and a brand new way for cooperatively regulating and controlling the stress performance friction behavior of a thin
film structure through a single gas parameter is disclosed. The method is simple in process, stable in control, good in
repeatability and low in cost, and a revolutionary surface technology solution is provided for performance jump of mechanical basic parts such as high-end bearings, hydraulic elements and precision dies.