High-bonding-force solid lubricating film layer used in wide temperature range environment, and preparation method of solid lubricating film layer

A solid lubricating, wide temperature range technology, applied in the field of high-binding solid lubricating film and its preparation, can solve the problems of low wear resistance, low hardness of sputtering film, easy to lose lubricating performance, etc. The effect of low layer friction coefficient, lower surface roughness, and better self-lubricating performance in a wide temperature range

Active Publication Date: 2018-12-11
SHANGHAI AEROSPACE EQUIP MFG GENERAL FACTORY
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Problems solved by technology

[0004] Commonly used MoS 2 The base space solid lubricating film layer is mainly for anti-friction, anti-cold welding and other lubrication requirements, because MoS 2 The sputtered film itself has low hardness and low wear resistance, so it is not suitable for surface modification of high-load transmission moving parts; and in a wide temperature range environment, MoS 2 Easily loses lubricating properties

Method used

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  • High-bonding-force solid lubricating film layer used in wide temperature range environment, and preparation method of solid lubricating film layer
  • High-bonding-force solid lubricating film layer used in wide temperature range environment, and preparation method of solid lubricating film layer

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Embodiment 1

[0029] A solid lubricating film layer with high binding force in a wide temperature range environment, such as figure 1 Shown; where the substrate 1, bonding layer 2 (Ti), transition layer 3 (TiN / TiCN), functional layer 4 (TiN), functional layer 5 (MoS 2 -Ag), substrate 1 is TC4 alloy, Ti / TiN / TiCN / (TiN / MoS 2 -Ag) nanocomposite multilayer film.

[0030] The specific preparation process of the high-binding force solid lubricating film layer in the above-mentioned space wide temperature range environment is carried out according to the following steps:

[0031] 1) Sputtering cleaning: After surface polishing, acetone ultrasonic cleaning, ethanol ultrasonic cleaning and drying, the coated samples are placed on the rotatable target stage in the coating equipment, and the vacuum chamber is evacuated to 4.0×10 -3 Pa, through Ar, the control air pressure is 3.0×10 -1 Pa, start the radio frequency to clean the sample by Ar plasma sputtering, the radio frequency power is 400W, and at...

Embodiment 2

[0038] The preparation time of TiN film layer in step 4 in embodiment 1 is shortened to 10min from 30min, MoS 2 - The preparation time of the Ag film layer was shortened from 9 minutes to 3 minutes, and the number of corresponding multi-layer layers was increased from 8 layers to 24 layers, and the total thickness of the film layer was kept consistent. Other steps were the same as in Example 1.

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Abstract

The invention discloses a high-bonding-force solid lubricating film layer used in a wide temperature range environment, and a preparation method of the solid lubricating film layer. A nanocrystallinecomposite coating, sequentially formed by a bonding layer (Ti), a transition layer (TiN/TiCN) and a functional layer (TiN/MoS2-Ag), is separately deposited on titanium alloy, aluminum alloy, stainlesssteel and a bearing steel substrate by using an ion implantation and deposition combined magnetron sputtering technology. The prepared nanocrystalline composite coatings can reliably service in the wide temperature range environment of -150 to 300 DEG C, and are strong in adhesion and low in friction coefficient, thus greatly prolonging the service life of moving parts of a spacecraft and improving the reliability of the spacecraft. Furthermore, the preparation method provided by the invention has the characteristics of being high in ionization rate, simple in membrane layer equipment structure, capable of realizing batch processing, and the like, thus being suitable for industrial production and having a good application prospect.

Description

[0001] Ju Pengfei, Wu Chao, Song Xiaohang, Sha Chunsheng, Li Zhongjian, Zhou Hong Technical field: [0002] The invention relates to the technical field of vacuum coating on the surface of materials, in particular to a solid lubricating film layer with high binding force in a wide space temperature range environment and a preparation method thereof. Background technique: [0003] With the continuous development of my country's aerospace industry, the demand for deep space exploration is becoming more and more urgent. Space detectors will be under the effects of several environments simultaneously in the deep space environment, and their performance will be more seriously degraded than the single factor environment. Therefore, it has become a top priority for model development to carry out research on the design and preparation technology of special film layers in special space environments, to break through the wear resistance of the motion mechanism of deep space probes, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/16C23C14/02C23C14/06C23C14/35C23C14/48C23C28/00
CPCC23C14/0036C23C14/025C23C14/06C23C14/0641C23C14/0664C23C14/16C23C14/325C23C14/35C23C14/48C23C28/30
Inventor 鞠鹏飞吴超宋晓航沙春生曹晓李忠建周宏
Owner SHANGHAI AEROSPACE EQUIP MFG GENERAL FACTORY
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