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A device for the preparation and transfer of thin-film cross-section samples

A sample preparation and thin film technology, which is applied in the field of preparation and transfer devices, can solve problems such as inconvenience in testing and characterization of cross-sectional samples, and achieve the effects of convenient transfer and testing, easy preparation and accurate characterization.

Active Publication Date: 2021-06-18
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the prior art, there are certain difficulties in the process of transferring the ion-cut samples to the scanning electron microscope test sample stage and the atomic force microscope test sample stage, and it is impossible to use the same sample for two tests of morphology, mechanical and electrical properties , which brings inconvenience to the test characterization of cross-sectional samples

Method used

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  • A device for the preparation and transfer of thin-film cross-section samples
  • A device for the preparation and transfer of thin-film cross-section samples
  • A device for the preparation and transfer of thin-film cross-section samples

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Embodiment Construction

[0046] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0047] In order to solve the above technical problems, an embodiment of the present invention proposes a device for preparing and transferring thin film cross-section samples. The device for preparing and transferring thin film cross-section samples according to the embodiments of the present invention may generally include a thin film sample fixing and transferring assembly 100 , a thin film sample position adjusting element 200 an...

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Abstract

The invention provides a device for preparing and transferring a film cross-section sample, comprising: a film sample fixing and transferring component for clamping the film sample; a film sample position adjusting element for adjusting the position of the film sample so that the film The edge of the sample protrudes from the upper surface of the film sample fixed transfer assembly to a specified height; and the mounting assembly is used to fix the film sample fixed transfer assembly holding the film sample, and is connected with the sample container of the supporting section sample preparation device Connect to secure the thin film sample holding transfer assembly to the sample container of the cross-sectional sample preparation device. The device is safe in operation, easy to install, convenient for the preparation of film cross-section samples, and facilitates the transfer and testing of the same film cross-section sample between different testing instruments after the cross-section sample preparation is completed.

Description

technical field [0001] The invention relates to the technical field of thin film testing, in particular to a device for preparing and transferring thin film section samples. Background technique [0002] At present, thin film materials are widely used in many fields, especially in the field of energy, such as lithium-ion battery pole pieces, fuel cell pole pieces, solar battery pole pieces, etc. In order to better understand and improve the properties of thin film materials, accurate characterization, testing and analysis of thin film material properties are crucial. The performance characterization of thin film materials includes macroscopic characterization and microscopic characterization, in which microscopic characterization involves testing the surface and cross section of thin film materials. [0003] The performance test of the sample cross-section has very important value and significance for characterizing and analyzing the characteristics of the sample. In addit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B26D7/02B26D7/00G01N1/28
CPCB26D7/00B26D7/02G01N1/286G01N2001/2873
Inventor 王其钰张献英禹习谦李泓
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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