Wafer transmission monitoring method and wafer transmission monitoring device

Abstract

The invention relates to a wafer transmission monitoring method and a wafer transmission monitoring device. The wafer transmission monitoring method comprises the following steps of acquiring the transmission track data of a plurality of standard wafers; obtaining a reference distribution interval of the wafer transmission track offset according to the plurality of pieces of standard wafer transmission track data; acquiring the transmission track data of a plurality of wafers to be tested; acquiring a to-be-measured distribution interval of the wafer transmission track offset according to theplurality of pieces of to-be-measured wafer transmission track data; and judging whether the median of the to-be-detected distribution interval deviates from the median of the reference distribution interval, and if so, determining that the wafer transmission is abnormal. According to the invention, the method achieves the prediction of the severe wafer transmission fault is predicted in advance,and the severe abnormal transmission fault caused by the accumulation of small wafer transmission faults is avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a method for monitoring wafer transmission and a device for monitoring wafer transmission. Background technique [0002] Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because its shape is generally set to a circle, it is called a wafer. Various circuit element structures can be processed on silicon wafers, thus becoming integrated circuit products with specific electrical functions. During the manufacturing process of semiconductor devices, it is often necessary to transfer wafers between different processing machines. For example, transfer devices such as EFEM (Equipment Front End Module, front-end transfer module) and vacuum transfer structures are used in semiconductor processing machines. The structure of the wafer. The transfer structure (such as a semiconductor industrial robot) is the core trans...

AI Technical Summary

Problems solved by technology

[0005] The present invention provides a wafer transmission monitoring method and a wafer transmission monitoring device, which are used to solve the problem in the prior art that serious failures of the transmission structure easily lead to serious shutdown of the semiconductor processing machine, so as to improve the efficiency of the semiconductor machine. The production efficiency of the platform provides guarantee for the continuity and stability of production

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