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A photoelectrode for optogenetic stimulation and electrophysiological recording and its preparation method

A technology for recording electrodes and light stimulation, applied in diagnostic recording/measurement, circuits, applications, etc., can solve the problems of recording signal interference, polyimide flexible and unfavorable probe position fine-tuning, etc., and achieve the effect of improving quality and reducing influence

Active Publication Date: 2021-10-08
杭州电子科技大学温州研究院有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are still some shortcomings in the above three photoelectrode structures, such as integrating the LED and the recording electrode on the same layer, the LED power supply line may introduce electromagnetic radiation to interfere with the recording signal, and the flexibility of polyimide is not conducive to the probe after implantation. Fine-tuning the position of

Method used

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  • A photoelectrode for optogenetic stimulation and electrophysiological recording and its preparation method
  • A photoelectrode for optogenetic stimulation and electrophysiological recording and its preparation method
  • A photoelectrode for optogenetic stimulation and electrophysiological recording and its preparation method

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Experimental program
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Effect test

Embodiment 1

[0052] The specific steps of the aforementioned LED photoelectrode preparation method for optogenetic stimulation and electrophysiological recording are as follows:

[0053] S1: Use a silicon wafer as the photoelectrode substrate, set the LED photo-stimulation layer 3 on the substrate, and realize the patterning of the micro-LED photo-stimulation sites through micro-processing technology; integrate multiple micro-LED photo-stimulation sites to realize Multi-channel photostimulation function.

[0054] S2: Deposit a layer of electromagnetic shielding layer 2 on the LED light stimulation layer 3, and reduce the electromagnetic interference of the LED to the recording channel through electromagnetic shielding.

[0055] S3: On the electromagnetic shielding layer 2, the recording electrode layer 1 is patterned by micro-processing technology, and multiple recording channels are integrated in the recording electrode layer 1 to realize high-resolution electrophysiological signal record...

Embodiment 2

[0094]The difference between this embodiment and embodiment 1 is:

[0095] In the preparation of the LED photostimulation layer 3, an ordinary double-sided polished silicon wafer is used as the substrate of the photoelectrode.

[0096] The design of the electromagnetic shielding layer 2 and the integration of the recording electrode layer 1 are the same as in the first embodiment.

[0097] In releasing the probe 5 , in step (6) front side deep reactive ion etching (DRIE) silicon on the front side of the substrate, and the etching depth is greater than the actual thickness of the probe 5 .

[0098] Steps (10) to (12) are replaced by: deep reactive ion etching (DRIE) silicon on the back, the etching depth is the thickness of the silicon wafer minus the actual thickness of the probe 5, and the contour lines of the front and back sides are opened through over-etching, The electrodes are thus released.

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Abstract

The invention discloses a photoelectrode used for optogenetic stimulation and electrophysiological recording and a preparation method thereof. The LED and the recording electrode in the existing photoelectrode are integrated on the same layer, and the LED power supply line may introduce electromagnetic radiation to interfere with the recording signal. The invention is a photoelectrode for optogenetic stimulation and electrophysiological recording, which comprises a recording electrode layer, an electromagnetic shielding layer and an LED light stimulating layer which are sequentially stacked. The metal layer in the electromagnetic shielding layer is grounded; the control signal in the LED light stimulation layer is prevented from interfering with the signal transmitted in the recording electrode layer through electrostatic shielding. The present invention overcomes the problem of limited spatial resolution of the hybrid packaging through the method of monolithic LED integration, divides the LED and the recording electrode into two functional layers, and adds a layer of metal shielding layer in between, effectively reducing the LED power supply line The effect on the recording channel adjacent to it, that is, electromagnetic interference, thus improving the quality of the signal.

Description

technical field [0001] The invention belongs to the technical field of preparation of biosensors in the field of brain-computer interface, in particular, it relates to a micro-processing preparation method of nerve photoelectrodes used for nerve recording and stimulation, which is achieved by monolithically integrating InGaN LEDs on a silicon substrate and Combined with the recording electrode layer to achieve the preparation. Background technique [0002] Over the past few decades, electrical stimulation of the brain has enabled us to gain a deeper understanding of the brain's function. To further advance the development of neuroscience and study the interaction of populations of neurons in complex networks, specific types of Individual neurons are selectively activated and inhibited, and optogenetics has revolutionized the analysis of neural circuits by introducing light-sensitive proteins into specific cell types, greatly improving the spatiotemporal resolution of stimula...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L33/00H01L33/06H01L33/38A61B5/293A61B5/263
CPCA61B2562/16A61B2562/164A61B2562/182H01L33/007H01L33/06H01L33/382H01L2933/0016
Inventor 王明浩郭帮帮程瑜华杨文伟陈颖叶柳顺王高峰
Owner 杭州电子科技大学温州研究院有限公司