Miniature microphone dustproof device and MEMS microphone

A dust-proof device and microphone technology, applied in the direction of sensors, electrostatic transducers, microphones, electrical components, etc., can solve the problems of poor dust-proof performance, buckling and wrinkling of the dust-proof film, and achieve the effect of suppressing deformation and ensuring dust-proof performance

Active Publication Date: 2020-09-25
WEIFANG GOERTEK MICROELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of the above problems, the purpose of the present invention is to provide a dust-proof structure and MEMS microphone to solve the problem that in the current tradit

Method used

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  • Miniature microphone dustproof device and MEMS microphone
  • Miniature microphone dustproof device and MEMS microphone
  • Miniature microphone dustproof device and MEMS microphone

Examples

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Embodiment Construction

[0021] In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that these embodiments may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.

[0022] In order to describe the micro-microphone dust-proof device of the present invention in detail, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0023] figure 1 A schematic structure of a micro-microphone dust-proof device according to an embodiment of the present invention is shown.

[0024] Such as figure 1 As shown, the miniature microphone dust-proof device of the embodiment of the present invention includes a support carrier 2 with a through hole 3 and a dust-proof fi...

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Abstract

The invention provides a miniature microphone dustproof device and an MEMS microphone. The miniature microphone dustproof device comprises a supporting carrier with a through hole and a dustproof filmarranged on one side of the supporting carrier. The dustproof film comprises a fixed part arranged on the supporting carrier, a filtering part suspended in the through hole, and a control part connected with the fixed part and the filtering part; and the elastic constant of the control unit is greater than the elastic constant of the filter unit. According to the invention, buckling deformation of the dustproof film can be concentrated on the control part, and the stable performance of the filtering part is ensured through the control part.

Description

technical field [0001] The invention relates to the technical field of electronic products, and more specifically, to a dust-proof device for a micro-microphone and a MEMS microphone provided with the dust-proof device for a micro-microphone. Background technique [0002] Existing MEMS microphones are usually provided with a dust-proof structure. The dust-proof structure mainly includes a support and a dust-proof film. The edge of the dust-proof film is arranged on the supporting area of ​​the support, and the middle part of the dust-proof film is suspended at the through hole of the support. The filter area is formed, and the dust-proof structure can prevent external dust, particles and other pollutants from entering the microphone, thereby ensuring the acoustic performance of the microphone product. [0003] However, in the current dust-proof structure, the filter area is usually a free standing membrane structure, so the film in the filter area is prone to buckling due to...

Claims

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Application Information

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IPC IPC(8): H04R19/04
CPCH04R19/04H04R2201/003
Inventor 畠山庸平游振江宫岛博志林育菁
Owner WEIFANG GOERTEK MICROELECTRONICS CO LTD
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