Position correction device for heating lamp

Abstract

The invention provides a position correcting device of a heating lamp. The device comprises a correcting insert and a seat body, wherein a limiting groove and an accommodating groove are formed in theseat body, the limiting groove is used for being matched with a lamp holder assembly of a heating lamp to limit the relative position of the seat body and the lamp holder assembly, and the heating lamp is arranged on the lamp holder assembly, the accommodating groove is used for accommodating the heating lamp after the relative position of the seat body and the lamp holder assembly is limited, the correcting insert is used for being inserted into the accommodating groove in the direction intersecting with the axial direction of the heating lamp after the heating lamp is contained in the accommodating groove, and the relative position of the heating lamp and the lamp holder assembly is limited. The device is advantaged in that through the position correction device of the heating lamp, consistency of installation of the heating lamp and the lamp holder assembly can be improved, so the service life of the heating lamp is prolonged, uniformity of a thermal field is improved, and uniformity of resistivity of an epitaxial wafer is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing equipment, in particular to a position correction device for a heating lamp. Background technique [0002] like Figure 1-Figure 5 As shown, in the semiconductor epitaxy process, the substrate 12 is usually heated by heating devices respectively arranged on the upper and lower sides of the substrate 12 to be processed. Each heating device is composed of a plurality of heating lamp assemblies 11, and the plurality of heating lamp assemblies 11 are evenly spaced on the same circumference, and the substrate 12 is heated by the light emitted by the heating lamp assembly 11 . [0003] like Figure 1-Figure 5 As shown, each existing heating lamp assembly 11 includes a heating lamp 13 and a lamp holder assembly 14, wherein the lamp holder assembly 14 includes a lamp holder body 141, a lamp holder bracket 142, a lamp holder bracket mounting plate 143, the heating lamp 13 and the lamp hold...

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Problems solved by technology

[0004] In practical applications, the bending accuracy of the lamp holder bracket 142 and the installation deviation between the lamp holder bracket 142 and the lamp holder bracket mounting plate 143 will affect the illumination direction of the heating lamp 13 , figure 2 Shown are two heat lamp assemblies 16 mounted with offsets in which the centerlines of the heat lamps 13 would be offset from the center of the substrate 12 and differ from the heating in the other heat lamp assemblies 11. The spacing between the lamps 13 is not uniform, resulting in reduced service life, and affects the uniformity of the thermal field, which in turn affects the uniformity of the resistivity of the epitaxial wafer

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