Signal carrier device, system and equipment for displacement measurement

A technology of displacement measurement and signal processing device, applied in measurement devices, optical devices, instruments, etc., can solve the problems of low yield, increased production cost, and high difficulty of high-precision manufacturing of gratings, and achieve high-precision displacement measurement and high-displacement measurement. Effect

Active Publication Date: 2020-12-01
深圳市立林智感科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the high-precision grating manufacturing of mid-to-high-end grating sensors is difficult and the yield rate is low, and the system assembly accuracy is high, which will cause the problem of increased production costs, resulting in high-end grating sensors.

Method used

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  • Signal carrier device, system and equipment for displacement measurement
  • Signal carrier device, system and equipment for displacement measurement
  • Signal carrier device, system and equipment for displacement measurement

Examples

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Embodiment Construction

[0057] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

[0058]The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.

[0059] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the description.

[0060] In all examples shown and discussed herein, any specific values ​​should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodiment may have diff...

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PUM

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Abstract

The invention discloses a signal carrier device, system and equipment for displacement measurement. The signal carrier device comprises an information storage medium and a displacement measurement code channel formed on the information storage medium, the displacement measurement code channel comprises a relative displacement measurement code channel, and the relative displacement measurement codechannel comprises protrusions and pits which are continuously, alternately and evenly arranged.

Description

technical field [0001] The present invention relates to the technical field of displacement measurement, and more specifically, to a signal carrier device for displacement measurement, a displacement measurement system, and a machine device. Background technique [0002] Displacement sensors can be divided into gratings, magnetic gratings, capacitive gratings, ball grids, inductive synchros and time gratings according to the applied technical principles. Among them, gratings are the most widely used in displacement measurement, especially mid-to-high-end grating sensors. This is because the sampling frequency, resolution, precision and performance of the grating sensor are unmatched by other types of displacement sensors. [0003] The installation accuracy of the light source, mask grating, moving grating scale and photoelectric sensor included in the mid-to-high-end grating sensor is very high, so that the mid-to-high-end grating sensor can achieve high-precision measureme...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B11/26G01D5/347
CPCG01B11/02G01B11/26G01D5/3473G01D5/34746
Inventor 林泰乐林立
Owner 深圳市立林智感科技有限公司
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