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Damage detection mechanism

A breakage detection and breakage technology, which is applied to measuring devices, grinding machine parts, optical testing flaws/defects, etc. Effect

Inactive Publication Date: 2020-12-25
TECHNO HOLON +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

On the other hand, when there is a breakage such as a chip in the rotary blade, the blocked light reaches the optical fiber on the incident side, so the amount of received light increases.

Method used

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Embodiment Construction

[0042] Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the shapes, sizes, and arrangement relationships of the components are only schematically shown to the extent that the present invention can be understood. In addition, although preferred structural examples of the present invention will be described below, the materials, numerical conditions, and the like of each structural element are merely preferred examples. Therefore, the present invention is not limited to the following embodiments, and various changes and deformations that can achieve the effects of the present invention can be made without departing from the scope of the configuration of the present invention.

[0043] (structure)

[0044] refer to figure 1 , figure 2 as well as image 3 , the structure of the damage detection mechanism of the present invention will be described. figure 1 It is a schematic diagram showing a damage detection mechanism. ...

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Abstract

To provide a damage detection mechanism capable of detecting damage of a rotary blade with better detection sensitivity and S / N ratio than conventional ones. The damage detection mechanism includes: acontrol unit; a light emitting unit; an emitting side optical fiber; an irradiation range conversion unit; an incident side lens; an incident side optical fiber; and a light receiving unit. The incident side lens is arranged at a position facing the irradiation range conversion unit with a rotary blade interposed therebetween. The light emitting unit outputs inspection light. The emission side optical fiber sends the inspection light to the irradiation range conversion unit. The irradiation range conversion unit emits the inspection light in a state of being narrowed down along a diameter ofthe rotary blade. The incident side lens collects the inspection light emitted through the irradiation range conversion unit and sends it to the incident side optical fiber. The incident side opticalfiber sends the inspection light to the light receiving unit. The light receiving unit converts the inspection light into an electric signal having an intensity according to an amount of received light. The control unit detects damage of the rotary blade based on an electric signal sent from the light receiving unit.

Description

technical field [0001] The present invention relates to a mechanism for detecting breakage of a rotary blade included in a cutting device. Background technique [0002] A wafer formed with a plurality of devices is cut, for example, by a dicing device including a rotary blade, and divided into a plurality of chips corresponding to each device. The rotary blade has a circular shape and is attached to the front end of the rotating main shaft. The outer peripheral portion of the rotary blade is a cutting edge formed by bonding abrasive grains such as diamond with a bonding material. The wafer is sliced ​​by rotating the rotary blade to cut into the wafer. [0003] The rotary insert may be damaged by chipping or the like due to the load during cutting. If a damaged rotary insert is used continuously, the workpiece may be damaged during cutting. Therefore, a mechanism for detecting such a malfunction of the rotary blade is required. [0004] As a mechanism for detecting brea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B49/16B24B49/12G01N21/95G01D5/34G01D5/26
CPCB24B49/165B24B49/12G01N21/95G01D5/34G01D5/268
Inventor 田中知行三浦元
Owner TECHNO HOLON