Gas safety device
A safety device and gas technology, which is applied in measuring devices, instruments, control/regulation systems, etc., can solve problems such as gas leakage, and achieve the effects of simple structure, cheap structure, and cost reduction
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no. 1 approach
[0024] figure 1 A block diagram of the gas safety device 21 in the first embodiment is shown. basic structure with Image 6 The basic structure of the conventional example shown is the same, and the gas safety device 21 of this embodiment is configured by the flow measurement unit 15 that measures the flow rate of the gas flowing through the flow path 1, using the flow measurement data measured by the flow measurement unit 15. A control circuit 9 for accumulating the usage amount of gas, a display unit not shown, and the like are configured.
[0025] The difference from the conventional example is that an absolute pressure sensor 5 as a first absolute pressure sensor capable of measuring absolute pressure and an absolute pressure sensor 7 as a second absolute pressure sensor are provided instead of Image 6 The pressure sensor 113 of the differential pressure measurement type for supply pressure measurement is shown. The absolute pressure sensor 5 is mounted as an electronic...
no. 2 approach
[0032] figure 2 It is a configuration diagram of the gas safety device 22 in the second embodiment. The basic structure and the one used in the description of the first embodiment figure 1 same. The difference from the first embodiment is that the ultrasonic flow measurement unit 4 integrating the ultrasonic sensor 6 and the ultrasonic sensor drive circuit 3 is installed in the gas atmosphere inside the flow path 1 as a flow measurement unit.
[0033] In addition, the absolute pressure sensor 5 configured as the first absolute pressure sensor is mounted on the circuit board that constitutes the ultrasonic sensor drive circuit 3, and the absolute pressure sensor 5 can also be controlled by controlling the ultrasonic flow rate measurement unit 4 through the control circuit 9. The operation of the circuit 9 is the same as that of the first embodiment.
[0034] As described above, in this embodiment, since fluctuations in the gas supply pressure can be detected by using two a...
no. 3 approach
[0036] image 3 It is a configuration diagram of the gas safety device 23 in the third embodiment. The basic structure used in the description of the second embodiment figure 2 same. The difference from the second embodiment is that a pressure measurement value error correction unit 10 is provided in the control circuit 9 .
[0037]The pressure measurement value error correcting unit 10 is in a situation where the pressure on the gas supply pressure side (that is, the pressure inside the flow path 1 ) is the same as the pressure on the atmospheric side during production of the gas safety device, and periodically or at arbitrary timing. , the difference between the measured values of the two absolute pressure sensors 5 and 7 is stored as a correction value. Furthermore, a relative measurement error between the two absolute pressure sensors 5 and 7 when a change in the gas supply pressure is determined by the gas pressure determination unit 8 is corrected. Accordingly, th...
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