Etching equipment
An etching equipment and etching solution technology, applied in the direction of electric solid devices, semiconductor devices, electrical components, etc., can solve the problems of residue, affecting product yield, and high etching solution cost, maintaining stability, prolonging service life, and reducing costs. Effect
Active Publication Date: 2022-07-12
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology
[0002] At present, the anode of the OLED is a stacked structure of ITO / Ag / ITO. The etching process generally uses an etching solution to etch the silver film layer of the anode. Higher, when the concentration is too high, it is easy to precipitate into silver particles and remain on the product, affecting the product yield; therefore, it is necessary to strictly control the concentration of silver ions in the etching solution. At present, the main control method is to control the life of the etching solution. The life of the solution is only 24 hours, so it needs to be replaced with a new etching solution to control the concentration of silver ions, resulting in a high cost of the etching solution
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[0021] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.
[0022] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc., or The positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience ...
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The application discloses an etching equipment, comprising: an etching solution supply source, including a first liquid storage tank, a second liquid storage tank, and an ion concentration set between the first liquid storage tank and the second liquid storage tank an adjusting device, the first liquid storage tank accommodates the metal ion etching liquid; the spraying device is communicated with the first liquid storage tank of the etching liquid supply source, so as to spray the metal ion etching liquid to at least one target; the liquid supply pipe The circuit is used for fluidly connecting the spray device and the first liquid storage tank of the etching solution supply source; wherein, the ion concentration adjusting device generates electrons to adjust the concentration of metal ions in the metal ion etching solution.
Description
technical field [0001] The present application relates to the field of display technology, and in particular, to an etching device. Background technique [0002] At present, the anode of OLED is a layered structure of ITO / Ag / ITO. The etching process generally uses etching solution to etch the silver film layer of the anode. High, when the concentration is too high, it is easy to re-precipitate into silver particles, which remain on the product and affect the product yield; therefore, it is necessary to strictly control the concentration of silver ions in the etching solution. At present, the main control method is to control the life of the etching solution, usually etching The life of the solution is only 24 hours, and it is necessary to replace the new etching solution to control the concentration of silver ions, resulting in a high cost of the etching solution. [0003] Therefore, there is a need to provide an etching apparatus. SUMMARY OF THE INVENTION [0004] The e...
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IPC IPC(8): H01L51/56H01L51/00C23F1/08H10K99/00
CPCC23F1/08H10K71/231H10K71/00
Inventor 许明
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD