Thermostat temperature control system and method

Abstract

The invention provides a thermostat temperature control system and method, and belongs to the field of super-stable thermostat control. The thermostat temperature control system comprises a first-stage temperature control unit and a second-stage temperature control unit, wherein the first-stage temperature control unit is arranged at one end of a temperature control cabinet, and the first-stage temperature control unit comprises a refrigeration system and a first-stage heater and is used for rapid adjustment in an initial stage; the second-stage temperature control unit is arranged at one endof a temperature control cavity, comprises a second-stage heater, is used for finely adjusting the temperature in the final stage, can reduce the influence of the temperature control cabinet and a remote transmission gas circuit on the temperature control of the temperature control cavity and improve the temperature control precision; and during operation, the refrigerating system and the first-stage heater act together to adjust the temperature of gas sent to an inlet of the temperature control cavity to be the optimal temperature T1, and then the temperature of a target point in the temperature control cavity is controlled to be the target temperature T0 through using the second-stage heater. The thermostat temperature control method for controlling the temperature by adopting the devices is divided into five stages. The thermostat temperature control system and the thermostat temperature control method are high in control precision and short in corresponding control time.

Description

technical field [0001] The invention belongs to the field of ultra-stable constant temperature device control, and more specifically relates to a temperature control system and method for a constant temperature device. Background technique [0002] In the semiconductor industry, some key equipment (such as lithography machines, interferometers, etc.) or local areas of the equipment have high requirements on the ambient temperature during operation, and a temperature deviation of 0.01°C or even lower will lead to product defects. How to control the ambient temperature of these devices and maintain their stability is a crucial factor for the normal operation of the devices. [0003] The publication number is CN 101551595A Chinese patent application discloses a method for controlling the temperature of the projection objective lens of a lithography machine, such as figure 1 As shown, it outputs the set value of the temperature control unit through the nonlinear PI controller, ...

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Problems solved by technology

[0006]Aiming at the defects of the prior art, the purpose of the present invention is to provide a temperature control system and method for a constant temperature device, which aims to solve the problem of using air as the medium in the prior art The temperature control method of the stable thermostat device takes a long time to respond, and the stability control accuracy needs to be improved

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