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3results about How to "Fast temperature control" patented technology

Temperature control system for liquid heater and semiconductor process equipment

ActiveCN224651797UFast temperature controlreduce bias
The application discloses a temperature control system of a liquid heater and a semiconductor process equipment, and relates to the technical field of semiconductors. The temperature control system comprises a first temperature acquisition module, a second temperature acquisition module and a power adjustment module. The power adjustment module is connected with the first temperature acquisition module, the second temperature acquisition module and a heating device in the liquid heater. The first temperature acquisition module acquires the temperature of liquid in a process cavity and outputs a corresponding first voltage value. The second temperature acquisition module acquires the temperature of the heating device and outputs a corresponding second voltage value. The power adjustment module generates a first voltage control signal according to the first voltage value and a first voltage threshold value, and generates a second voltage control signal according to the second voltage value and a second voltage threshold value. The first and second voltage control signals are used for adjusting the power of the heating device. The application adopts a double adjustment (i.e. two-way temperature control) algorithm, and the temperature control speed is faster and the deviation is smaller.
Owner:北京华丞电子股份有限公司

Portable liquid nitrogen temperature-controlled box

A portable liquid nitrogen temperature control box, comprising a combined box, a heat preservation layer is arranged in the combined box, a heat insulation layer for placing liquid nitrogen is embedded in the heat preservation layer, a heating plate is arranged in the heat insulation layer, a temperature control disc is movably arranged at the opening of the upper side of the heat preservation layer, a steam plate is arranged at the lower side of the temperature control disc, a constant temperature cavity is formed in the temperature control disc and is closed by the steam plate; the liquid nitrogen is heated by the heating plate, the vaporized liquid nitrogen passes through the steam plate to the constant temperature cavity, and then is heated by the temperature control disc, so that the constant temperature cavity maintains constant temperature; the combined box comprises a bottom shell, a middle shell is clamped and fixed on the upper side of the bottom shell, an upper shell is clamped and fixed on the upper side of the middle shell, a square hole is formed in the middle of the upper shell, the square hole is used for placing a heat preservation cover, the heat preservation cover is located on the upper side of the temperature control disc, the upper side of the temperature control disc is clamped on the inner side of the heat preservation cover, and the lower side of the temperature control disc is located in the heat preservation layer. The utility model has the advantages of fast temperature control speed, convenient carrying, small size and the like.
Owner:SICHUAN YUNSHUO TECH CO LTD

Bushing plate module and basalt fiber drawing process

The invention discloses a bushing module and a basalt fiber drawing process, and relates to the technical field of fiber forming. The bushing plate module comprises a bushing plate structure; the bushing structure comprises a heat-resistant insulating ring, a storage shell and a forming vertical pipe, the smelting furnace inner cavity, the heat-resistant insulating ring inner cavity, the storage shell inner cavity and the forming vertical pipe inner cavity are communicated in sequence; the storage shell comprises a vertical cylinder and a first bottom plate; the top end of the outer side wall of the vertical cylinder is connected with a wiring end, the bottom end of the outer side wall of the vertical cylinder is connected with a wiring terminal, and the bottom end of the formed vertical pipe is connected with a wiring piece. According to the invention, the four wiring terminals arranged in four directions, the four wiring terminals arranged in opposite directions and the six wiring pieces arranged in opposite directions are arranged at different height positions of the bushing module, so that layered and staggered currents are formed, the temperature uniformity of the bushing module is improved, and the temperature uniformity of basalt melt in the bushing module is further improved.
Owner:SHANDONG ZHUJIAN NEW MATERIAL TECH CO LTD