Termoelectric crystal round plate
A chuck and wafer technology, applied in the direction of thermoelectric devices, circuits, electrical components, etc., can solve the problems of wafer thermal feedback and heating control ability, general products have no structure, no cooling function, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0051] In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the specific implementation, structure, characteristics and features of the thermoelectric wafer chuck proposed according to the present invention will be described below in conjunction with the accompanying drawings and preferred embodiments. Efficacy, detailed as follows.
[0052] One aspect of the present invention is to provide a thermoelectric wafer chuck suitable for semiconductor manufacturing process. The thermoelectric wafer chuck has a chuck base and a wafer carrying surface. A plurality of fluid passages are conducted in the chuck base in a single-circuit or multi-circuit manner for distributing heating or cooling liquid. The thermoelectric module is in thermal contact with the wafer carrier surface. The thermoelectric module includes a plurality of P-type semiconductor connectors and a plurality of N-type semiconductor conn...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com