AOI equipment for MEMS device
A technology for detecting equipment and devices, which is applied to conveyor objects, transportation and packaging, etc., can solve the problems of high cost, low material transportation efficiency, and complex AOI equipment structure, and achieve the effect of simplifying the structure, improving transportation efficiency and reducing costs.
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[0024]The present invention will be further described below in conjunction with the description of the drawings and the specific embodiments.
[0025]Such asFigure 1 to Figure 7As shown, a MEMS device AOI detection equipment includes a frame 1, a stepping ejecting module 2, a conveying and discharging module 3, a conveying and discharging module 4, and a three-axis auto-focusing module 5. The stepping The ejecting module 2, the conveying and discharging module 3, the conveying and discharging module 4, and the three-axis auto-focusing module 5 are respectively installed on the frame 1, and the stepping ejecting module 2 is used to pass through The conveying and discharging module 3 lifts the detection object, the three-axis autofocus module 5 is used to detect the lifted detection object and determine whether the detection object is qualified. The conveying and discharging module 4 is The structure of the feeding and discharging module 3 is the same, but the installation position is di...
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