A thin film pressure sensor and layout method thereof
A thin-film pressure and layout method technology, which is applied in the direction of instruments, measuring force, electromagnetic measuring devices, etc., can solve the problem of low sensitivity and achieve the effects of improving pressure detection sensitivity, long service life, and firm and reliable structure
Active Publication Date: 2022-01-11
HUNAN QITAI INFORMATION TECH
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Problems solved by technology
At present, the thin-film pressure sensor includes a flat diaphragm and a thin-film sensing resistor on the flat diaphragm, but the sensing resistor generally adopts simple straight line wiring, which has the problem of low sensitivity.
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[0085] Such as figure 1 with figure 2 As shown, the present embodiment provides a thin film pressure sensor, including a flat diaphragm (such as figure 1 1) and the film-shaped first induction unit set on the flat diaphragm (such as figure 1 2), the first induction unit includes m helical multi-segment resistance wires arranged around the center O of the circular deformation region of the flat diaphragm, and m / 2 helical multi-segment resistance wires on one side are formed in series The second sensing resistor R2 and the m / 2 spiral multi-segment resistance wires on the other side are connected in series to form a fourth sensing resistor R4, where m is a multiple of 4. see figure 2 , as an optional implementation, the value of m in this embodiment is 12, 12 spiral multi-segment resistance lines, and 6 spiral multi-segment resistance lines on one side are connected in series to form the second sensing resistor R2 (its terminal Respectively R 2_1 and R 2_2 ), and 6 spi...
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The invention discloses a thin-film pressure sensor and its layout method. The thin-film pressure sensor of the invention includes a flat diaphragm and a first sensing unit arranged on the flat diaphragm in the form of a thin film. The first sensing unit includes a m helical multi-segment resistance lines arranged at the center O of the circular deformation area, and m / 2 helical multi-segment resistance lines on one side are connected in series to form the second sensing resistor R2, and m / 2 helical multi-segment resistance lines on the other side The resistor lines are connected in series to form the fourth sensing resistor R4, and m is a multiple of 4; the layout method includes layout for the first sensing unit. The invention can make full use of the radial strain and tangential strain of the flat diaphragm, which improves the detection sensitivity of the thin film pressure sensor, and the strain difference between the two sides of the spiral multi-segment resistance wire is smaller, which is not easy to cause the resistance wire to be twisted, and is beneficial to the spiral The long-term and stable combination of the multi-segment resistance wire and the flat diaphragm has a longer service life and a firmer and more reliable structure.
Description
technical field [0001] The invention relates to a thin-film resistance strain pressure sensor (referred to as a thin-film pressure sensor), in particular to a thin-film pressure sensor and a layout method thereof. Background technique [0002] Sensors are an important technical basis for the new technology revolution and the information society. It, together with communication technology and computer technology, constitutes the three pillars of the information industry. It is one of the key and core technologies to improve the level of intelligent manufacturing and industrial automation. A pressure sensor is a measurement device that converts the measured pressure into a corresponding, easy-to-accurate electrical output (such as current, voltage, etc.), and has been widely used. The working process of the pressure sensor is generally to convert the pressure or pressure into a strain or displacement by an elastic sensitive element, and then cooperate with various forms of con...
Claims
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IPC IPC(8): G01B7/16G01L1/22
CPCG01B7/18G01L1/2262G01L9/0055
Inventor 王国秋黄坚陈璀
Owner HUNAN QITAI INFORMATION TECH