The application discloses a kind of active shutdown test equipment, method and system of hybrid commutation converter, and compensation power module includes multiple power modules in series together;Power module includes diode, capacitor and controllable switch;Series capacitor and controllable switch are connected in parallel to the two ends of diode;The diode of multiple power modules is in series together;Test product and first inductive reactor are connected into first branch, and the first end and the second end of first branch are respectively connected the first end of direct currentinductance and the first end of capacitor;Test product and second inductive reactor are connected into second branch, and the first end and the second end of second branch are respectively connected the first end of direct currentinductance and the second end of capacitor;Test product includes one or more integrated gate commutated thyristor;The second end of direct currentinductance is connected to the first end of compensation power module, and the second end of compensation power module is connected to the second end of capacitor.Compensation power module can supplement energy, use inductive resistance value smaller inductance, small volume and low cost.
A hybrid induction-resistive heating system for processingsemiconductor substrates includes a single induction coil surrounding a cylindrical susceptor and at least two resistive heaters disposed within the susceptor. The susceptor provides electromagnetic shielding to isolate the coil from the resistive heaters. A controller independently regulates heater output in response to temperature measurements within the heater to equalize temperatures across multiple zones of the susceptor. In operation, the coil provides rapid bulk heating while the resistive heaters supply localized spot heat, resulting in uniform thermal conditions along the length of the heater. The system achieves temperatures up to 2300° C. suitable for heat treatingsiliconcarbide substrates in batch processes.