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Automatic probe test board

A test stand and probe stand technology, which is applied to measuring devices, measuring instrument components, instruments, etc., can solve problems such as troublesomeness, limited adjustment accuracy, and inconvenient probe positioning and adjustment.

Pending Publication Date: 2021-03-16
ZHEJIANG SHUREN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The T-103A manual probe test bench is a manual probe test bench produced by the 45th Research Institute of China Electronics Technology Group Corporation. It includes a probe stage microscope, a film holder, and an X-Y moving platform. Its shortcomings are: 1. Its X-Y mobile platform adopts manual adjustment, and the adjustment accuracy is limited
2. Its film support table cannot be rotated. When the material is placed on the film support table, it is necessary to manually adjust the material to the best position, which is very troublesome
3. Its probe positioning adjustment is not convenient enough

Method used

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Examples

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Embodiment Construction

[0021] Example: see Figures 1 to 4 As shown in the figure, the automated probe test bench includes a substrate 1, a probe microscope 2, a CCD camera 3 and a PC 4, a Y-direction linear guide rail 6 is fixed on the base 5, and a substrate bracket 9 is inserted in the Y direction. On the linear guide rail 6, the Y-direction motor 7 is fixed on the base 5, the Y-direction screw rod 8 is fixed on the rotating shaft of the Y-direction motor 7, the Y-direction nut 91 is fixed on the support piece support 9, and the Y-direction screw rod 8 and the Y direction screw rod 8 are fixed on the Y-direction motor 7. Screw together to the nut 91;

[0022] The X-direction linear guide rail 10 is fixed on the support 9 of the film support table, the support 11 of the support film is inserted and sleeved on the X-direction linear guide rail 10, the X-direction motor 12 is fixed on the support 9 of the film support table, and the rotating shaft of the X-direction motor 12 An X-direction screw 13...

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PUM

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Abstract

The invention relates to an automatic probe test board comprising a wafer bearing table, a probe table microscope, a CCD camera and a PC, a Y-direction linear guide rail is fixed on a base, a wafer bearing table support sleeves the Y-direction linear guide rail, a Y-direction motor is fixed on the base, a Y-direction screw rod is fixed on a rotating shaft of the Y-direction motor, a Y-direction nut is fixed on the wafer bearing table support, and the Y-direction screw rod is screwed with the Y-direction nut; an X-direction linear guide rail is fixed to the wafer bearing table support, the wafer bearing table support is inserted into the X-direction linear guide rail in a sleeved mode, the X-direction motor is fixed to the wafer bearing table support, an X-direction lead screw is fixed to arotating shaft of the X-direction motor, and the X-direction lead screw and the wafer bearing table support are connected together in a threaded mode. The stepping motor is adopted to drive the waferbearing table to move in the X direction and the Y direction, the wafer bearing table can rotate to enable materials to be automatically adjusted to a proper position, and the probe device is good ininsulativity and convenient to adjust.

Description

technical field [0001] The invention relates to the technical field of detection equipment, and more specifically relates to a detection equipment with a probe. Background technique [0002] The T-103A manual probe test bench is a manual probe test bench produced by the 45th Research Institute of China Electronics Technology Group Corporation. It includes a probe stage microscope, a film holder, and an X-Y moving platform. Its shortcomings are: 1. Its X-Y mobile platform adopts manual adjustment, and the adjustment accuracy is limited. 2. Its film support table cannot be rotated. When the material is placed on the film support table, it is very troublesome to manually adjust the material to the best position. 3. Its probe positioning adjustment is not convenient enough. Contents of the invention [0003] The purpose of the present invention is to provide an automatic probe test platform for the deficiencies of the prior art, which uses a stepping motor to drive the X-dir...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D11/00G05B19/042
CPCG01D11/00G05B19/042
Inventor 吴建锋阮越许森尉理哲叶芳芳徐振宇江俊王金铭
Owner ZHEJIANG SHUREN UNIV